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- W1998427302 abstract "Motivated by the need for at-wavelength observation of extreme ultraviolet (EUV) lithography masks, we developed a full-field EUV microscope that has a multilayer-mirror objective. This objective is based on an innovative optical design that gives a magnification of over ×1400, enabling us to use a conventional charge-coupled device (CCD) camera as the detector. In addition, when the objective is corrected for off-axis aberrations, it has a large field of view of a few hundred micrometers, permitting rapid inspection of a whole mask. We demonstrate this novel design by presenting at-wavelength images of a mask." @default.
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- W1998427302 date "2012-10-25" @default.
- W1998427302 modified "2023-10-18" @default.
- W1998427302 title "At-Wavelength Extreme Ultraviolet Lithography Mask Observation Using a High-Magnification Objective with Three Multilayer Mirrors" @default.
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- W1998427302 doi "https://doi.org/10.1143/apex.5.112501" @default.
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