Matches in SemOpenAlex for { <https://semopenalex.org/work/W1998443001> ?p ?o ?g. }
- W1998443001 abstract "In this work we present the fabrication and operation of incandescent microlamps for integrated optics applications. This microlamp emits white and infrared light from a chromium resistor embedded in a free-standing silicon oxynitride (SiOxNy) cantilever that can be coupled to an optical waveguide. In fact, the chromium resistor is sandwiched between layers of SiOxNy that isolate it from the atmosphere, while electric current heats the resistor to incandescent temperatures. The same SiOxNy material used in the microlamp fabrication is also used to produce the optical waveguides to allow a monolithic integration of light source and optical circuit. Front-side bulk micromachining of the silicon substrate in potassium hydroxide (KOH) solution is used to fabricate the cantilevers that thermally isolate the resistors from the substrate, thus reducing the heat transfer and the current required to light the lamp." @default.
- W1998443001 created "2016-06-24" @default.
- W1998443001 creator A5014112057 @default.
- W1998443001 creator A5045336715 @default.
- W1998443001 creator A5089336211 @default.
- W1998443001 date "2008-09-02" @default.
- W1998443001 modified "2023-09-26" @default.
- W1998443001 title "MEMS-based incandescent microlamps for integrated optics applications" @default.
- W1998443001 cites W1965306035 @default.
- W1998443001 cites W1967039552 @default.
- W1998443001 cites W1973284857 @default.
- W1998443001 cites W1987800875 @default.
- W1998443001 cites W1995625556 @default.
- W1998443001 cites W2015912525 @default.
- W1998443001 cites W2025551803 @default.
- W1998443001 cites W2026475472 @default.
- W1998443001 cites W2040868867 @default.
- W1998443001 cites W2048898385 @default.
- W1998443001 cites W2056799979 @default.
- W1998443001 cites W2065924695 @default.
- W1998443001 cites W2077959404 @default.
- W1998443001 cites W2078182993 @default.
- W1998443001 cites W2084055966 @default.
- W1998443001 cites W2084064945 @default.
- W1998443001 cites W2106868612 @default.
- W1998443001 cites W2111947104 @default.
- W1998443001 cites W2165619354 @default.
- W1998443001 cites W2534673004 @default.
- W1998443001 doi "https://doi.org/10.1088/1464-4258/10/10/104022" @default.
- W1998443001 hasPublicationYear "2008" @default.
- W1998443001 type Work @default.
- W1998443001 sameAs 1998443001 @default.
- W1998443001 citedByCount "3" @default.
- W1998443001 countsByYear W19984430012018 @default.
- W1998443001 countsByYear W19984430012020 @default.
- W1998443001 crossrefType "journal-article" @default.
- W1998443001 hasAuthorship W1998443001A5014112057 @default.
- W1998443001 hasAuthorship W1998443001A5045336715 @default.
- W1998443001 hasAuthorship W1998443001A5089336211 @default.
- W1998443001 hasConcept C111368507 @default.
- W1998443001 hasConcept C119599485 @default.
- W1998443001 hasConcept C120665830 @default.
- W1998443001 hasConcept C121332964 @default.
- W1998443001 hasConcept C127313418 @default.
- W1998443001 hasConcept C127413603 @default.
- W1998443001 hasConcept C136525101 @default.
- W1998443001 hasConcept C137488568 @default.
- W1998443001 hasConcept C141354745 @default.
- W1998443001 hasConcept C142724271 @default.
- W1998443001 hasConcept C145667562 @default.
- W1998443001 hasConcept C159985019 @default.
- W1998443001 hasConcept C165801399 @default.
- W1998443001 hasConcept C173886181 @default.
- W1998443001 hasConcept C192562407 @default.
- W1998443001 hasConcept C204787440 @default.
- W1998443001 hasConcept C2777289219 @default.
- W1998443001 hasConcept C37977207 @default.
- W1998443001 hasConcept C49040817 @default.
- W1998443001 hasConcept C544956773 @default.
- W1998443001 hasConcept C71924100 @default.
- W1998443001 hasConceptScore W1998443001C111368507 @default.
- W1998443001 hasConceptScore W1998443001C119599485 @default.
- W1998443001 hasConceptScore W1998443001C120665830 @default.
- W1998443001 hasConceptScore W1998443001C121332964 @default.
- W1998443001 hasConceptScore W1998443001C127313418 @default.
- W1998443001 hasConceptScore W1998443001C127413603 @default.
- W1998443001 hasConceptScore W1998443001C136525101 @default.
- W1998443001 hasConceptScore W1998443001C137488568 @default.
- W1998443001 hasConceptScore W1998443001C141354745 @default.
- W1998443001 hasConceptScore W1998443001C142724271 @default.
- W1998443001 hasConceptScore W1998443001C145667562 @default.
- W1998443001 hasConceptScore W1998443001C159985019 @default.
- W1998443001 hasConceptScore W1998443001C165801399 @default.
- W1998443001 hasConceptScore W1998443001C173886181 @default.
- W1998443001 hasConceptScore W1998443001C192562407 @default.
- W1998443001 hasConceptScore W1998443001C204787440 @default.
- W1998443001 hasConceptScore W1998443001C2777289219 @default.
- W1998443001 hasConceptScore W1998443001C37977207 @default.
- W1998443001 hasConceptScore W1998443001C49040817 @default.
- W1998443001 hasConceptScore W1998443001C544956773 @default.
- W1998443001 hasConceptScore W1998443001C71924100 @default.
- W1998443001 hasLocation W19984430011 @default.
- W1998443001 hasOpenAccess W1998443001 @default.
- W1998443001 hasPrimaryLocation W19984430011 @default.
- W1998443001 hasRelatedWork W1671790935 @default.
- W1998443001 hasRelatedWork W2022502529 @default.
- W1998443001 hasRelatedWork W2055098182 @default.
- W1998443001 hasRelatedWork W2067798966 @default.
- W1998443001 hasRelatedWork W2086877788 @default.
- W1998443001 hasRelatedWork W2095724690 @default.
- W1998443001 hasRelatedWork W2105661619 @default.
- W1998443001 hasRelatedWork W2106016506 @default.
- W1998443001 hasRelatedWork W2117535079 @default.
- W1998443001 hasRelatedWork W2119843423 @default.
- W1998443001 hasRelatedWork W2125693132 @default.
- W1998443001 hasRelatedWork W2163383851 @default.
- W1998443001 hasRelatedWork W2164062241 @default.
- W1998443001 hasRelatedWork W2164861392 @default.
- W1998443001 hasRelatedWork W2370450616 @default.
- W1998443001 hasRelatedWork W2487369905 @default.