FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1998565584> ?p ?o ?g. }

• W1998565584 abstract "The increasing demands to the performance of lithography tools require extensive efforts for monitoring the lithography processes. Relevant parameters for the lithography process are the critical dimension (CD), the profile of the structure and the defect density. CD and profiles are influenced by parameters like focus and dose settings of the lithography process. Another important parameter is the film thickness of the used bottom antireflective coating (BARC) and resist. Up to now the monitoring of these parameters requires the application of various measurement tools like ellipsometers for the thickness measurement, scanning electron microscope (SEM) for CD and profile analysis. The defect inspection is additionally used for focus monitoring. Here we present an investigation of the application of the scatterometry method to obtain all of these parameters on one single wafer with only one single measurement step. It turns out that the scatterometry measurement is not only much faster than the conventional methods, but even more stable and reliable. We demonstrate the potential of scatterometry to enhance the quality of process monitoring accompanied by a significant reduction of costs for the process monitoring." @default.
• W1998565584 created "2016-06-24" @default.
• W1998565584 creator A5022630912 @default.
• W1998565584 creator A5048250855 @default.
• W1998565584 creator A5054604464 @default.
• W1998565584 creator A5085042661 @default.
• W1998565584 creator A5089418792 @default.
• W1998565584 date "2011-09-01" @default.
• W1998565584 modified "2023-09-26" @default.
• W1998565584 title "Fast and efficient characterization of photolithographic systems by optical scatterometry" @default.
• W1998565584 cites W2118914178 @default.
• W1998565584 cites W2243245267 @default.
• W1998565584 doi "https://doi.org/10.1109/scd.2011.6068751" @default.
• W1998565584 hasPublicationYear "2011" @default.
• W1998565584 type Work @default.
• W1998565584 sameAs 1998565584 @default.
• W1998565584 citedByCount "0" @default.
• W1998565584 crossrefType "proceedings-article" @default.
• W1998565584 hasAuthorship W1998565584A5022630912 @default.
• W1998565584 hasAuthorship W1998565584A5048250855 @default.
• W1998565584 hasAuthorship W1998565584A5054604464 @default.
• W1998565584 hasAuthorship W1998565584A5085042661 @default.
• W1998565584 hasAuthorship W1998565584A5089418792 @default.
• W1998565584 hasConcept C105487726 @default.
• W1998565584 hasConcept C108406538 @default.
• W1998565584 hasConcept C111919701 @default.
• W1998565584 hasConcept C120665830 @default.
• W1998565584 hasConcept C121332964 @default.
• W1998565584 hasConcept C151730666 @default.
• W1998565584 hasConcept C160671074 @default.
• W1998565584 hasConcept C162996421 @default.
• W1998565584 hasConcept C171250308 @default.
• W1998565584 hasConcept C192209626 @default.
• W1998565584 hasConcept C192562407 @default.
• W1998565584 hasConcept C195766429 @default.
• W1998565584 hasConcept C204223013 @default.
• W1998565584 hasConcept C207789793 @default.
• W1998565584 hasConcept C2779227376 @default.
• W1998565584 hasConcept C2780841128 @default.
• W1998565584 hasConcept C2781448156 @default.
• W1998565584 hasConcept C41008148 @default.
• W1998565584 hasConcept C49040817 @default.
• W1998565584 hasConcept C53524968 @default.
• W1998565584 hasConcept C58097730 @default.
• W1998565584 hasConcept C77928131 @default.
• W1998565584 hasConcept C86803240 @default.
• W1998565584 hasConcept C89002693 @default.
• W1998565584 hasConcept C94263209 @default.
• W1998565584 hasConcept C98045186 @default.
• W1998565584 hasConceptScore W1998565584C105487726 @default.
• W1998565584 hasConceptScore W1998565584C108406538 @default.
• W1998565584 hasConceptScore W1998565584C111919701 @default.
• W1998565584 hasConceptScore W1998565584C120665830 @default.
• W1998565584 hasConceptScore W1998565584C121332964 @default.
• W1998565584 hasConceptScore W1998565584C151730666 @default.
• W1998565584 hasConceptScore W1998565584C160671074 @default.
• W1998565584 hasConceptScore W1998565584C162996421 @default.
• W1998565584 hasConceptScore W1998565584C171250308 @default.
• W1998565584 hasConceptScore W1998565584C192209626 @default.
• W1998565584 hasConceptScore W1998565584C192562407 @default.
• W1998565584 hasConceptScore W1998565584C195766429 @default.
• W1998565584 hasConceptScore W1998565584C204223013 @default.
• W1998565584 hasConceptScore W1998565584C207789793 @default.
• W1998565584 hasConceptScore W1998565584C2779227376 @default.
• W1998565584 hasConceptScore W1998565584C2780841128 @default.
• W1998565584 hasConceptScore W1998565584C2781448156 @default.
• W1998565584 hasConceptScore W1998565584C41008148 @default.
• W1998565584 hasConceptScore W1998565584C49040817 @default.
• W1998565584 hasConceptScore W1998565584C53524968 @default.
• W1998565584 hasConceptScore W1998565584C58097730 @default.
• W1998565584 hasConceptScore W1998565584C77928131 @default.
• W1998565584 hasConceptScore W1998565584C86803240 @default.
• W1998565584 hasConceptScore W1998565584C89002693 @default.
• W1998565584 hasConceptScore W1998565584C94263209 @default.
• W1998565584 hasConceptScore W1998565584C98045186 @default.
• W1998565584 hasLocation W19985655841 @default.
• W1998565584 hasOpenAccess W1998565584 @default.
• W1998565584 hasPrimaryLocation W19985655841 @default.
• W1998565584 hasRelatedWork W1599891132 @default.
• W1998565584 hasRelatedWork W1601842572 @default.
• W1998565584 hasRelatedWork W1712733447 @default.
• W1998565584 hasRelatedWork W1851319514 @default.
• W1998565584 hasRelatedWork W1983752964 @default.
• W1998565584 hasRelatedWork W2003646440 @default.
• W1998565584 hasRelatedWork W2019441526 @default.
• W1998565584 hasRelatedWork W2028528668 @default.
• W1998565584 hasRelatedWork W2033284723 @default.
• W1998565584 hasRelatedWork W2037214816 @default.
• W1998565584 hasRelatedWork W2066966906 @default.
• W1998565584 hasRelatedWork W2081173939 @default.
• W1998565584 hasRelatedWork W2085304129 @default.
• W1998565584 hasRelatedWork W2115322984 @default.
• W1998565584 hasRelatedWork W2151096016 @default.
• W1998565584 hasRelatedWork W2164119437 @default.
• W1998565584 hasRelatedWork W2541440459 @default.
• W1998565584 hasRelatedWork W3039262438 @default.
• W1998565584 hasRelatedWork W3169385832 @default.
• W1998565584 hasRelatedWork W2840322942 @default.
• W1998565584 isParatext "false" @default.
• W1998565584 isRetracted "false" @default.

• next