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- W1998628233 abstract "Differential Hall effect measurements have been carried out to obtain electron concentration and mobility profiles for 2 keV implants of 1×1015 Sb+ cm−2 in 〈100〉 silicon with nanometre resolution. A comparison is made between carrier and atomic profiles determined using secondary ion mass spectroscopy." @default.
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- W1998628233 date "2004-01-01" @default.
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- W1998628233 title "Carrier and mobility profiling of ultra-shallow junctions in Sb implanted silicon" @default.
- W1998628233 doi "https://doi.org/10.1049/el:20040493" @default.
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