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- W1998657224 abstract "Abstract Gas sensors based on SnO 2 films deposited by sol-gel on a Si substrate have been fabricated, characterised and tested. The results of structural characterisation and the sensing tests have shown the validity of this technological approach, which is a very promising step towards the full integration of the gas sensors in VLSI Si technology." @default.
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- W1998657224 date "1999-09-01" @default.
- W1998657224 modified "2023-10-18" @default.
- W1998657224 title "A SnO2 microsensor device for sub-ppm NO2 detection" @default.
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- W1998657224 doi "https://doi.org/10.1016/s0925-4005(99)00132-x" @default.
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