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• W1998706654 endingPage "2929" @default.
• W1998706654 startingPage "2929" @default.
• W1998706654 abstract "In this study, we investigate hydrogen and oxygen plasma effects on undoped and n–p compensation-doped polycrystalline silicon (poly-Si) resistors. The current–voltage ( I – V ) characteristics, channel resistance ( R p ), contact region resistance ( R j ), total resistance ( R T = R p + R j ), and activation energy of the poly-Si resistors with different film lengths and passivation layers were measured and analyzed. It is found that the film resistance has been strongly enhanced by either hydrogen or oxygen plasma treatments, which is attributed to the neutralization effect of plasma treatment inside the grain being overridden by the passivation effect at the grain boundary. Moreover, it is seen that both the total resistance and activation energy of undoped intrinsic films are larger than those of n–p compensation-doped films. To realize a high-value poly-Si resistor, a novel multilayer structure is proposed for the first time. Compared with the conventional single-layer structure, it is seen that the relatively smaller grain size in a four-layer structure results in an approximately 25–50% increase in resistance." @default.
• W1998706654 created "2016-06-24" @default.
• W1998706654 creator A5046388911 @default.
• W1998706654 creator A5059678523 @default.
• W1998706654 creator A5082176307 @default.
• W1998706654 date "2005-05-01" @default.
• W1998706654 modified "2023-09-23" @default.
• W1998706654 title "Hydrogen and Oxygen Plasma Effects on Undoped and n–p Compensation-doped Single- and Multilayer Polycrystalline Silicon Resistor Films" @default.
• W1998706654 cites W1973847191 @default.
• W1998706654 cites W1976522537 @default.
• W1998706654 cites W1989311103 @default.
• W1998706654 cites W2010484025 @default.
• W1998706654 cites W2010696162 @default.
• W1998706654 cites W2015082300 @default.
• W1998706654 cites W2018695808 @default.
• W1998706654 cites W2022291710 @default.
• W1998706654 cites W2022700994 @default.
• W1998706654 cites W2026171711 @default.
• W1998706654 cites W2028402586 @default.
• W1998706654 cites W2062712927 @default.
• W1998706654 cites W2068830465 @default.
• W1998706654 cites W2087180805 @default.
• W1998706654 cites W2092338967 @default.
• W1998706654 cites W2137229423 @default.
• W1998706654 cites W2145157049 @default.
• W1998706654 cites W2157962228 @default.
• W1998706654 cites W1974530718 @default.
• W1998706654 doi "https://doi.org/10.1143/jjap.44.2929" @default.
• W1998706654 hasPublicationYear "2005" @default.
• W1998706654 type Work @default.
• W1998706654 sameAs 1998706654 @default.
• W1998706654 citedByCount "1" @default.
• W1998706654 countsByYear W19987066542017 @default.
• W1998706654 crossrefType "journal-article" @default.
• W1998706654 hasAuthorship W1998706654A5046388911 @default.
• W1998706654 hasAuthorship W1998706654A5059678523 @default.
• W1998706654 hasAuthorship W1998706654A5082176307 @default.
• W1998706654 hasConcept C113196181 @default.
• W1998706654 hasConcept C119599485 @default.
• W1998706654 hasConcept C127413603 @default.
• W1998706654 hasConcept C137488568 @default.
• W1998706654 hasConcept C137637335 @default.
• W1998706654 hasConcept C147789679 @default.
• W1998706654 hasConcept C159985019 @default.
• W1998706654 hasConcept C165801399 @default.
• W1998706654 hasConcept C178790620 @default.
• W1998706654 hasConcept C185592680 @default.
• W1998706654 hasConcept C191897082 @default.
• W1998706654 hasConcept C192562407 @default.
• W1998706654 hasConcept C2779227376 @default.
• W1998706654 hasConcept C2780565262 @default.
• W1998706654 hasConcept C33574316 @default.
• W1998706654 hasConcept C43617362 @default.
• W1998706654 hasConcept C47908070 @default.
• W1998706654 hasConcept C49040817 @default.
• W1998706654 hasConcept C512968161 @default.
• W1998706654 hasConcept C540031477 @default.
• W1998706654 hasConcept C57863236 @default.
• W1998706654 hasConcept C87359718 @default.
• W1998706654 hasConcept C87976508 @default.
• W1998706654 hasConcept C95121573 @default.
• W1998706654 hasConceptScore W1998706654C113196181 @default.
• W1998706654 hasConceptScore W1998706654C119599485 @default.
• W1998706654 hasConceptScore W1998706654C127413603 @default.
• W1998706654 hasConceptScore W1998706654C137488568 @default.
• W1998706654 hasConceptScore W1998706654C137637335 @default.
• W1998706654 hasConceptScore W1998706654C147789679 @default.
• W1998706654 hasConceptScore W1998706654C159985019 @default.
• W1998706654 hasConceptScore W1998706654C165801399 @default.
• W1998706654 hasConceptScore W1998706654C178790620 @default.
• W1998706654 hasConceptScore W1998706654C185592680 @default.
• W1998706654 hasConceptScore W1998706654C191897082 @default.
• W1998706654 hasConceptScore W1998706654C192562407 @default.
• W1998706654 hasConceptScore W1998706654C2779227376 @default.
• W1998706654 hasConceptScore W1998706654C2780565262 @default.
• W1998706654 hasConceptScore W1998706654C33574316 @default.
• W1998706654 hasConceptScore W1998706654C43617362 @default.
• W1998706654 hasConceptScore W1998706654C47908070 @default.
• W1998706654 hasConceptScore W1998706654C49040817 @default.
• W1998706654 hasConceptScore W1998706654C512968161 @default.
• W1998706654 hasConceptScore W1998706654C540031477 @default.
• W1998706654 hasConceptScore W1998706654C57863236 @default.
• W1998706654 hasConceptScore W1998706654C87359718 @default.
• W1998706654 hasConceptScore W1998706654C87976508 @default.
• W1998706654 hasConceptScore W1998706654C95121573 @default.
• W1998706654 hasIssue "5R" @default.
• W1998706654 hasLocation W19987066541 @default.
• W1998706654 hasOpenAccess W1998706654 @default.
• W1998706654 hasPrimaryLocation W19987066541 @default.
• W1998706654 hasRelatedWork W125617560 @default.
• W1998706654 hasRelatedWork W1644972741 @default.
• W1998706654 hasRelatedWork W1970753049 @default.
• W1998706654 hasRelatedWork W1998706654 @default.
• W1998706654 hasRelatedWork W2083119222 @default.
• W1998706654 hasRelatedWork W2803463400 @default.
• W1998706654 hasRelatedWork W3023869297 @default.
• W1998706654 hasRelatedWork W3081348527 @default.
• W1998706654 hasRelatedWork W3135425688 @default.

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