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- W1998757410 abstract "Frequency enhancement with decreased fluctuation is available by using micromechanically-coupled synchronized resonator system. The system consists of two geometrically designed and empirically fabricated singly-clamped beam-shaped cantilevers (19.5 ¿m and 30 ¿m long ×5 ¿m wide ×100 nm thick). Two cantilevers, with resonant frequencies of 295.72 kHz (detecting) and 145.01 kHz (sensing) respectively, are coupled by a thin support as a mechanical element. The frequency response signal can thus be doubled with a decreased fluctuation when the detecting cantilever is synchronized with the sensing one. A reformed micromechanically-coupled resonator system is further designed using Coventor Ware <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>¿</sup> software and vibration modes are simulated for next application study." @default.
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- W1998757410 date "2010-01-01" @default.
- W1998757410 modified "2023-09-27" @default.
- W1998757410 title "Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise" @default.
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- W1998757410 doi "https://doi.org/10.1109/memsys.2010.5442309" @default.
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