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- W1998786034 abstract "In this paper, we developed a new method to grow robust ultrathin oxynitride (E/sub OT/=18 A) film with effective dielectric constant of 7.15. By NH/sub 3/-nitridation of Si substrate, grown ultrathin Si/sub 3/N/sub 4/ With N/sub 2/O annealing shows excellent electrical properties in terms of significant lower leakage current, very low bulk trap density and trap generation rate, and high endurance in stressing. In addition, this oxynitride film exhibits relatively weak temperature dependence due to a Fowler-Nordheim (FN) tunneling mechanism. This dielectric film appears to be promising for future ultralarge scale integrated (ULSI) devices." @default.
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- W1998786034 date "2001-05-01" @default.
- W1998786034 modified "2023-09-25" @default.
- W1998786034 title "Characterization of ultrathin oxynitride (18-21 A) gate dielectrics by NH/sub 3/ nitridation and N/sub 2/O RTA treatment" @default.
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- W1998786034 doi "https://doi.org/10.1109/16.918238" @default.
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