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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1999068085> ?p ?o ?g. }

• W1999068085 abstract "In this study, flat piezoelectric microcantilevers were fabricated under low-stress Pb(Zr0.52Ti0.48)O3 (PZT) film conditions. They were analyzed using the Raman spectrum and wafer curvature methods. Based on the residual stress analysis, we found that a thickness of 1 μm was critical, since stress relaxation starts to occur at greater thicknesses, due to surface roughening. The (111) preferred orientation started to decrease when the film thickness was greater than 1 μm. The d33 value was closely related to the stress relaxation associated with the preferred orientation changes. We examined the harmonic response at different PZT cantilever lengths and obtained a 9.4-μm tip displacement at 3 Vp-p at 1 kHz. These analyses can provide a platform for the reliable operation of piezoelectric microdevices, potentially nanodevice when one needs to have simultaneous control of the residual stress and the piezoelectric properties." @default.
• W1999068085 created "2016-06-24" @default.
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• W1999068085 date "2010-09-30" @default.
• W1999068085 modified "2023-09-26" @default.
• W1999068085 title "The Microscopic Origin of Residual Stress for Flat Self-Actuating Piezoelectric Cantilevers" @default.
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• W1999068085 doi "https://doi.org/10.1007/s11671-010-9810-z" @default.
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