Matches in SemOpenAlex for { <https://semopenalex.org/work/W1999080404> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W1999080404 endingPage "322" @default.
- W1999080404 startingPage "317" @default.
- W1999080404 abstract "Estimation methods for ultra-shallow profiling with secondary ion mass spectrometry (SIMS) were investigated. The depth and concentration of ultra-shallow profiles were calibrated using multi-delta-doped samples and bulk-doped samples. Boron profiles, whose implantation energy is 200 eV or less, were measured by backside SIMS analysis in order to minimize the atomic mixing effect. This analysis enabled accurate junction depth measurements for even 200 eV boron implanted samples when the primary oxygen ion energy was 500 eV or less, but the sample preparation time was relatively long. SIMS depth resolution functions were then extracted from surface-side and backside (true) profiles in order to deconvolute degraded surface-side profiles. This deconvolution analysis of SIMS (surface-side) profiles, using the depth resolution functions, provided profiles of similar quality to those obtained by backside SIMS analysis and was a relatively quick process." @default.
- W1999080404 created "2016-06-24" @default.
- W1999080404 creator A5004081743 @default.
- W1999080404 creator A5006846310 @default.
- W1999080404 creator A5020791877 @default.
- W1999080404 creator A5048081200 @default.
- W1999080404 creator A5050516034 @default.
- W1999080404 date "2004-01-01" @default.
- W1999080404 modified "2023-09-26" @default.
- W1999080404 title "Ultra-shallow depth profiling with secondary ion mass spectrometry" @default.
- W1999080404 cites W1983686977 @default.
- W1999080404 cites W1987038961 @default.
- W1999080404 cites W1990516560 @default.
- W1999080404 cites W1991287871 @default.
- W1999080404 cites W2054805633 @default.
- W1999080404 cites W2060728882 @default.
- W1999080404 cites W2074246505 @default.
- W1999080404 cites W2135824477 @default.
- W1999080404 doi "https://doi.org/10.1116/1.1622672" @default.
- W1999080404 hasPublicationYear "2004" @default.
- W1999080404 type Work @default.
- W1999080404 sameAs 1999080404 @default.
- W1999080404 citedByCount "18" @default.
- W1999080404 countsByYear W19990804042012 @default.
- W1999080404 countsByYear W19990804042016 @default.
- W1999080404 countsByYear W19990804042018 @default.
- W1999080404 crossrefType "journal-article" @default.
- W1999080404 hasAuthorship W1999080404A5004081743 @default.
- W1999080404 hasAuthorship W1999080404A5006846310 @default.
- W1999080404 hasAuthorship W1999080404A5020791877 @default.
- W1999080404 hasAuthorship W1999080404A5048081200 @default.
- W1999080404 hasAuthorship W1999080404A5050516034 @default.
- W1999080404 hasBestOaLocation W19990804041 @default.
- W1999080404 hasConcept C113196181 @default.
- W1999080404 hasConcept C120665830 @default.
- W1999080404 hasConcept C121332964 @default.
- W1999080404 hasConcept C145148216 @default.
- W1999080404 hasConcept C162356407 @default.
- W1999080404 hasConcept C174576160 @default.
- W1999080404 hasConcept C178790620 @default.
- W1999080404 hasConcept C185592680 @default.
- W1999080404 hasConcept C192562407 @default.
- W1999080404 hasConcept C41823505 @default.
- W1999080404 hasConcept C43617362 @default.
- W1999080404 hasConcept C49040817 @default.
- W1999080404 hasConcept C501308230 @default.
- W1999080404 hasConcept C57863236 @default.
- W1999080404 hasConcept C77671233 @default.
- W1999080404 hasConceptScore W1999080404C113196181 @default.
- W1999080404 hasConceptScore W1999080404C120665830 @default.
- W1999080404 hasConceptScore W1999080404C121332964 @default.
- W1999080404 hasConceptScore W1999080404C145148216 @default.
- W1999080404 hasConceptScore W1999080404C162356407 @default.
- W1999080404 hasConceptScore W1999080404C174576160 @default.
- W1999080404 hasConceptScore W1999080404C178790620 @default.
- W1999080404 hasConceptScore W1999080404C185592680 @default.
- W1999080404 hasConceptScore W1999080404C192562407 @default.
- W1999080404 hasConceptScore W1999080404C41823505 @default.
- W1999080404 hasConceptScore W1999080404C43617362 @default.
- W1999080404 hasConceptScore W1999080404C49040817 @default.
- W1999080404 hasConceptScore W1999080404C501308230 @default.
- W1999080404 hasConceptScore W1999080404C57863236 @default.
- W1999080404 hasConceptScore W1999080404C77671233 @default.
- W1999080404 hasIssue "1" @default.
- W1999080404 hasLocation W19990804041 @default.
- W1999080404 hasOpenAccess W1999080404 @default.
- W1999080404 hasPrimaryLocation W19990804041 @default.
- W1999080404 hasRelatedWork W1985325156 @default.
- W1999080404 hasRelatedWork W2012199654 @default.
- W1999080404 hasRelatedWork W2033669323 @default.
- W1999080404 hasRelatedWork W2054572570 @default.
- W1999080404 hasRelatedWork W2065231857 @default.
- W1999080404 hasRelatedWork W2084883795 @default.
- W1999080404 hasRelatedWork W2088081281 @default.
- W1999080404 hasRelatedWork W2136721111 @default.
- W1999080404 hasRelatedWork W2142976730 @default.
- W1999080404 hasRelatedWork W4220916081 @default.
- W1999080404 hasVolume "22" @default.
- W1999080404 isParatext "false" @default.
- W1999080404 isRetracted "false" @default.
- W1999080404 magId "1999080404" @default.
- W1999080404 workType "article" @default.