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- W1999252520 abstract "This short note describes a unique process for the preparation of high-quality titanium oxide (TiO 2 ) with zirconium silicate (ZrSi x O y ) as an interfacial layer for use in gate dielectric applications. Compared with conventional chemical oxide and oxynitride as an interfacial layer, titanium oxide (TiO 2 ) metal-oxide-semiconductor (MOS) capacitors with zirconium silicate (ZrSi x O y ) as an interfacial layer exhibit lower leakage current levels at the same equivalent oxide thickness. We were able to confirm the achievement of the TiO 2 /ZrSi x O y stack structure by Auger electron spectroscopy (AES) and transmission electron microscope (TEM) analysis. The equivalent oxide thickness (EOT) and leakage current density at the gate bias 1 V below the flatband voltage ( V FB ) were 10.3 Å and 1 mA/cm 2 , respectively. The zirconium silicate is a promising interfacial layer for future high-k gate dielectric applications." @default.
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- W1999252520 date "2001-12-01" @default.
- W1999252520 modified "2023-09-26" @default.
- W1999252520 title "Electrical Characteristics of TiO<sub>2</sub>/ZrSi<sub>x</sub>O<sub>y</sub> Stack Gate Dielectric for Metal-Oxide-Semiconductor Device Applications" @default.
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- W1999252520 doi "https://doi.org/10.1143/jjap.40.6803" @default.
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