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- W1999354098 endingPage "1295" @default.
- W1999354098 startingPage "1292" @default.
- W1999354098 abstract "A focused MeV nickel ion beam was used for making contact vias in a multilayer structure through a passivation layer. The structures had two aluminum layers isolated by a Si3N4 insulating layer. The distribution of implanted nickel ions was controlled by changing the implantation energy. After the implantation, current-voltage characteristics between the two aluminum layers were measured by a two-point probe method. When the distribution of nickel was adjusted at the Si3N1 insulating layer, electrical conduction was observed at the nickel fluence of 1 × 1017–2 × 1018 ions/cm2, and it was found that the conductivity was increased and the breakdown voltage was decreased as the fluence of nickel ions increased." @default.
- W1999354098 created "2016-06-24" @default.
- W1999354098 creator A5002127846 @default.
- W1999354098 creator A5004167045 @default.
- W1999354098 creator A5005795857 @default.
- W1999354098 creator A5010757568 @default.
- W1999354098 creator A5031835005 @default.
- W1999354098 creator A5056213756 @default.
- W1999354098 creator A5078213650 @default.
- W1999354098 creator A5081197222 @default.
- W1999354098 date "1993-01-01" @default.
- W1999354098 modified "2023-10-01" @default.
- W1999354098 title "Maskless fabrication of contact vias by focused MeV heavy ion beam" @default.
- W1999354098 cites W1968488352 @default.
- W1999354098 cites W2047135551 @default.
- W1999354098 cites W2088985156 @default.
- W1999354098 cites W2987637782 @default.
- W1999354098 doi "https://doi.org/10.1016/0168-583x(93)90784-4" @default.
- W1999354098 hasPublicationYear "1993" @default.
- W1999354098 type Work @default.
- W1999354098 sameAs 1999354098 @default.
- W1999354098 citedByCount "0" @default.
- W1999354098 crossrefType "journal-article" @default.
- W1999354098 hasAuthorship W1999354098A5002127846 @default.
- W1999354098 hasAuthorship W1999354098A5004167045 @default.
- W1999354098 hasAuthorship W1999354098A5005795857 @default.
- W1999354098 hasAuthorship W1999354098A5010757568 @default.
- W1999354098 hasAuthorship W1999354098A5031835005 @default.
- W1999354098 hasAuthorship W1999354098A5056213756 @default.
- W1999354098 hasAuthorship W1999354098A5078213650 @default.
- W1999354098 hasAuthorship W1999354098A5081197222 @default.
- W1999354098 hasConcept C113196181 @default.
- W1999354098 hasConcept C136525101 @default.
- W1999354098 hasConcept C142724271 @default.
- W1999354098 hasConcept C145148216 @default.
- W1999354098 hasConcept C171250308 @default.
- W1999354098 hasConcept C178790620 @default.
- W1999354098 hasConcept C185592680 @default.
- W1999354098 hasConcept C191897082 @default.
- W1999354098 hasConcept C192562407 @default.
- W1999354098 hasConcept C204787440 @default.
- W1999354098 hasConcept C22078206 @default.
- W1999354098 hasConcept C2779227376 @default.
- W1999354098 hasConcept C33574316 @default.
- W1999354098 hasConcept C41823505 @default.
- W1999354098 hasConcept C43617362 @default.
- W1999354098 hasConcept C49040817 @default.
- W1999354098 hasConcept C504270822 @default.
- W1999354098 hasConcept C50774322 @default.
- W1999354098 hasConcept C513153333 @default.
- W1999354098 hasConcept C71924100 @default.
- W1999354098 hasConcept C93106096 @default.
- W1999354098 hasConceptScore W1999354098C113196181 @default.
- W1999354098 hasConceptScore W1999354098C136525101 @default.
- W1999354098 hasConceptScore W1999354098C142724271 @default.
- W1999354098 hasConceptScore W1999354098C145148216 @default.
- W1999354098 hasConceptScore W1999354098C171250308 @default.
- W1999354098 hasConceptScore W1999354098C178790620 @default.
- W1999354098 hasConceptScore W1999354098C185592680 @default.
- W1999354098 hasConceptScore W1999354098C191897082 @default.
- W1999354098 hasConceptScore W1999354098C192562407 @default.
- W1999354098 hasConceptScore W1999354098C204787440 @default.
- W1999354098 hasConceptScore W1999354098C22078206 @default.
- W1999354098 hasConceptScore W1999354098C2779227376 @default.
- W1999354098 hasConceptScore W1999354098C33574316 @default.
- W1999354098 hasConceptScore W1999354098C41823505 @default.
- W1999354098 hasConceptScore W1999354098C43617362 @default.
- W1999354098 hasConceptScore W1999354098C49040817 @default.
- W1999354098 hasConceptScore W1999354098C504270822 @default.
- W1999354098 hasConceptScore W1999354098C50774322 @default.
- W1999354098 hasConceptScore W1999354098C513153333 @default.
- W1999354098 hasConceptScore W1999354098C71924100 @default.
- W1999354098 hasConceptScore W1999354098C93106096 @default.
- W1999354098 hasLocation W19993540981 @default.
- W1999354098 hasOpenAccess W1999354098 @default.
- W1999354098 hasPrimaryLocation W19993540981 @default.
- W1999354098 hasRelatedWork W1623063880 @default.
- W1999354098 hasRelatedWork W1982776373 @default.
- W1999354098 hasRelatedWork W2001630397 @default.
- W1999354098 hasRelatedWork W2007350853 @default.
- W1999354098 hasRelatedWork W2036211671 @default.
- W1999354098 hasRelatedWork W2076208074 @default.
- W1999354098 hasRelatedWork W2082400119 @default.
- W1999354098 hasRelatedWork W2084616009 @default.
- W1999354098 hasRelatedWork W2184448544 @default.
- W1999354098 hasRelatedWork W2316233621 @default.
- W1999354098 hasVolume "80-81" @default.
- W1999354098 isParatext "false" @default.
- W1999354098 isRetracted "false" @default.
- W1999354098 magId "1999354098" @default.
- W1999354098 workType "article" @default.