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- W1999368165 abstract "Abstract A positive-tone wet silylation process for I-line lithography is developed, using safe solvents and the commercial photoresist AZ 5214E (by Hoechst). The process is capable of resolving 0.3 μm lines and spaces on photoresist. Various silylating conditions, solution concentrations and two silylating agents namely HMCTS and B(DMA)DS have been tried. Silicon concentration, focus and exposure latitudes have been defined." @default.
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- W1999368165 date "1994-01-01" @default.
- W1999368165 modified "2023-10-17" @default.
- W1999368165 title "Lithographic evaluation of a new wet silylation process using safe solvents and the commercial photoresist AZ 5214ETM" @default.
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- W1999368165 doi "https://doi.org/10.1016/0167-9317(94)90152-x" @default.
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