Matches in SemOpenAlex for { <https://semopenalex.org/work/W1999402111> ?p ?o ?g. }
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- W1999402111 endingPage "2903" @default.
- W1999402111 startingPage "2903" @default.
- W1999402111 abstract "We developed an x-ray lithography system for the “lithographite, galvanoformung, and abformung” process using synchrotron radiation at the NewSUBARU facility of the University of Hyogo, Hyogo, Japan. The x-ray lithography system can utilize two different energy regions: one is a high-energy region: from 2 to 12 keV, and the other is a low-energy region from 1 to 2 keV. Each energy region can be selected in accordance with the size and shape of the desired microstructures. Large-area patterning across an A4-size area was successfully performed with a highly uniform pattern thickness. Furthermore, high-aspect-ratio patterning using a high-x-ray-energy region was also achieved using this x-ray lithography system." @default.
- W1999402111 created "2016-06-24" @default.
- W1999402111 creator A5028287652 @default.
- W1999402111 creator A5056946407 @default.
- W1999402111 date "2005-01-01" @default.
- W1999402111 modified "2023-10-11" @default.
- W1999402111 title "Large area and wide dimension range x-ray lithography for lithographite, galvanoformung, and abformung process using energy variable synchrotron radiation" @default.
- W1999402111 cites W2030010906 @default.
- W1999402111 cites W2030151767 @default.
- W1999402111 cites W2045131085 @default.
- W1999402111 doi "https://doi.org/10.1116/1.2131880" @default.
- W1999402111 hasPublicationYear "2005" @default.
- W1999402111 type Work @default.
- W1999402111 sameAs 1999402111 @default.
- W1999402111 citedByCount "29" @default.
- W1999402111 countsByYear W19994021112012 @default.
- W1999402111 countsByYear W19994021112014 @default.
- W1999402111 countsByYear W19994021112016 @default.
- W1999402111 countsByYear W19994021112019 @default.
- W1999402111 crossrefType "journal-article" @default.
- W1999402111 hasAuthorship W1999402111A5028287652 @default.
- W1999402111 hasAuthorship W1999402111A5056946407 @default.
- W1999402111 hasConcept C120665830 @default.
- W1999402111 hasConcept C121332964 @default.
- W1999402111 hasConcept C153385146 @default.
- W1999402111 hasConcept C159985019 @default.
- W1999402111 hasConcept C16332341 @default.
- W1999402111 hasConcept C163581340 @default.
- W1999402111 hasConcept C171250308 @default.
- W1999402111 hasConcept C186370098 @default.
- W1999402111 hasConcept C192562407 @default.
- W1999402111 hasConcept C200274948 @default.
- W1999402111 hasConcept C204223013 @default.
- W1999402111 hasConcept C204323151 @default.
- W1999402111 hasConcept C21368211 @default.
- W1999402111 hasConcept C2779227376 @default.
- W1999402111 hasConcept C2779328170 @default.
- W1999402111 hasConcept C41794268 @default.
- W1999402111 hasConcept C53524968 @default.
- W1999402111 hasConcept C62520636 @default.
- W1999402111 hasConceptScore W1999402111C120665830 @default.
- W1999402111 hasConceptScore W1999402111C121332964 @default.
- W1999402111 hasConceptScore W1999402111C153385146 @default.
- W1999402111 hasConceptScore W1999402111C159985019 @default.
- W1999402111 hasConceptScore W1999402111C16332341 @default.
- W1999402111 hasConceptScore W1999402111C163581340 @default.
- W1999402111 hasConceptScore W1999402111C171250308 @default.
- W1999402111 hasConceptScore W1999402111C186370098 @default.
- W1999402111 hasConceptScore W1999402111C192562407 @default.
- W1999402111 hasConceptScore W1999402111C200274948 @default.
- W1999402111 hasConceptScore W1999402111C204223013 @default.
- W1999402111 hasConceptScore W1999402111C204323151 @default.
- W1999402111 hasConceptScore W1999402111C21368211 @default.
- W1999402111 hasConceptScore W1999402111C2779227376 @default.
- W1999402111 hasConceptScore W1999402111C2779328170 @default.
- W1999402111 hasConceptScore W1999402111C41794268 @default.
- W1999402111 hasConceptScore W1999402111C53524968 @default.
- W1999402111 hasConceptScore W1999402111C62520636 @default.
- W1999402111 hasIssue "6" @default.
- W1999402111 hasLocation W19994021111 @default.
- W1999402111 hasOpenAccess W1999402111 @default.
- W1999402111 hasPrimaryLocation W19994021111 @default.
- W1999402111 hasRelatedWork W1980872048 @default.
- W1999402111 hasRelatedWork W2004026453 @default.
- W1999402111 hasRelatedWork W2023075187 @default.
- W1999402111 hasRelatedWork W2031124237 @default.
- W1999402111 hasRelatedWork W2040471795 @default.
- W1999402111 hasRelatedWork W2051614709 @default.
- W1999402111 hasRelatedWork W2071910516 @default.
- W1999402111 hasRelatedWork W2082143708 @default.
- W1999402111 hasRelatedWork W2094357931 @default.
- W1999402111 hasRelatedWork W3217393128 @default.
- W1999402111 hasVolume "23" @default.
- W1999402111 isParatext "false" @default.
- W1999402111 isRetracted "false" @default.
- W1999402111 magId "1999402111" @default.
- W1999402111 workType "article" @default.