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- W1999422329 abstract "A novel micro-machined resonant accelerometer designed with differential structure is put forward. The device structure is a seismic mass supported by two flexural hinges and two vibrating beams, in which the hinges and the beams are doubly-clamped by the seismic mass and the substrate. Due to the different thickness of the hinges and the beams, the neutral axes of the hinges and the beams are not coplanar. Therefore, the beams encounter axial stress induced by the bending of the hinges when out-of-plane acceleration applied on the seismic mass, which will result in the change of the resonant frequency of the beams. Two vibrating beams are arranged symmetrically on both sides of the seismic mass to form the differential structure to improve the performance of the sensor. SOI-MEMS processes are adopted to achieve the complicated structure with different thickness simultaneously by three-step DRIE etching. Preliminary experiments show that the Q-factors of the two vibrating beams are about 400 in air and the differential sensitivity measured can reach 584 Hz/g." @default.
- W1999422329 created "2016-06-24" @default.
- W1999422329 creator A5006044944 @default.
- W1999422329 creator A5034084187 @default.
- W1999422329 creator A5049215297 @default.
- W1999422329 creator A5071753148 @default.
- W1999422329 date "2011-10-01" @default.
- W1999422329 modified "2023-09-24" @default.
- W1999422329 title "A novel micromachined differential resonant accelerometer with flexural mechanisms fabricated by SOI-MEMS technology" @default.
- W1999422329 cites W1985903408 @default.
- W1999422329 cites W2007620779 @default.
- W1999422329 cites W2055982894 @default.
- W1999422329 cites W2073111866 @default.
- W1999422329 cites W2127484235 @default.
- W1999422329 cites W2149871666 @default.
- W1999422329 doi "https://doi.org/10.1109/icsens.2011.6127041" @default.
- W1999422329 hasPublicationYear "2011" @default.
- W1999422329 type Work @default.
- W1999422329 sameAs 1999422329 @default.
- W1999422329 citedByCount "1" @default.
- W1999422329 countsByYear W19994223292014 @default.
- W1999422329 crossrefType "proceedings-article" @default.
- W1999422329 hasAuthorship W1999422329A5006044944 @default.
- W1999422329 hasAuthorship W1999422329A5034084187 @default.
- W1999422329 hasAuthorship W1999422329A5049215297 @default.
- W1999422329 hasAuthorship W1999422329A5071753148 @default.
- W1999422329 hasConcept C100460472 @default.
- W1999422329 hasConcept C117896860 @default.
- W1999422329 hasConcept C121332964 @default.
- W1999422329 hasConcept C124634506 @default.
- W1999422329 hasConcept C127413603 @default.
- W1999422329 hasConcept C130472188 @default.
- W1999422329 hasConcept C141354745 @default.
- W1999422329 hasConcept C159985019 @default.
- W1999422329 hasConcept C168834538 @default.
- W1999422329 hasConcept C178405089 @default.
- W1999422329 hasConcept C192562407 @default.
- W1999422329 hasConcept C21200559 @default.
- W1999422329 hasConcept C24326235 @default.
- W1999422329 hasConcept C24890656 @default.
- W1999422329 hasConcept C2779227376 @default.
- W1999422329 hasConcept C37977207 @default.
- W1999422329 hasConcept C44000306 @default.
- W1999422329 hasConcept C49040817 @default.
- W1999422329 hasConcept C62520636 @default.
- W1999422329 hasConcept C66938386 @default.
- W1999422329 hasConcept C74650414 @default.
- W1999422329 hasConcept C87210426 @default.
- W1999422329 hasConcept C89805583 @default.
- W1999422329 hasConceptScore W1999422329C100460472 @default.
- W1999422329 hasConceptScore W1999422329C117896860 @default.
- W1999422329 hasConceptScore W1999422329C121332964 @default.
- W1999422329 hasConceptScore W1999422329C124634506 @default.
- W1999422329 hasConceptScore W1999422329C127413603 @default.
- W1999422329 hasConceptScore W1999422329C130472188 @default.
- W1999422329 hasConceptScore W1999422329C141354745 @default.
- W1999422329 hasConceptScore W1999422329C159985019 @default.
- W1999422329 hasConceptScore W1999422329C168834538 @default.
- W1999422329 hasConceptScore W1999422329C178405089 @default.
- W1999422329 hasConceptScore W1999422329C192562407 @default.
- W1999422329 hasConceptScore W1999422329C21200559 @default.
- W1999422329 hasConceptScore W1999422329C24326235 @default.
- W1999422329 hasConceptScore W1999422329C24890656 @default.
- W1999422329 hasConceptScore W1999422329C2779227376 @default.
- W1999422329 hasConceptScore W1999422329C37977207 @default.
- W1999422329 hasConceptScore W1999422329C44000306 @default.
- W1999422329 hasConceptScore W1999422329C49040817 @default.
- W1999422329 hasConceptScore W1999422329C62520636 @default.
- W1999422329 hasConceptScore W1999422329C66938386 @default.
- W1999422329 hasConceptScore W1999422329C74650414 @default.
- W1999422329 hasConceptScore W1999422329C87210426 @default.
- W1999422329 hasConceptScore W1999422329C89805583 @default.
- W1999422329 hasLocation W19994223291 @default.
- W1999422329 hasOpenAccess W1999422329 @default.
- W1999422329 hasPrimaryLocation W19994223291 @default.
- W1999422329 hasRelatedWork W1596747348 @default.
- W1999422329 hasRelatedWork W1967397946 @default.
- W1999422329 hasRelatedWork W1975967429 @default.
- W1999422329 hasRelatedWork W1979672953 @default.
- W1999422329 hasRelatedWork W2015338406 @default.
- W1999422329 hasRelatedWork W2032142064 @default.
- W1999422329 hasRelatedWork W2099150211 @default.
- W1999422329 hasRelatedWork W2103835370 @default.
- W1999422329 hasRelatedWork W2120738703 @default.
- W1999422329 hasRelatedWork W2127298535 @default.
- W1999422329 hasRelatedWork W2136750600 @default.
- W1999422329 hasRelatedWork W2138569870 @default.
- W1999422329 hasRelatedWork W2533999205 @default.
- W1999422329 hasRelatedWork W2620617296 @default.
- W1999422329 hasRelatedWork W2749462371 @default.
- W1999422329 hasRelatedWork W2740249350 @default.
- W1999422329 hasRelatedWork W2820942896 @default.
- W1999422329 hasRelatedWork W2828768437 @default.
- W1999422329 hasRelatedWork W2846418169 @default.
- W1999422329 hasRelatedWork W3052720368 @default.
- W1999422329 isParatext "false" @default.
- W1999422329 isRetracted "false" @default.
- W1999422329 magId "1999422329" @default.
- W1999422329 workType "article" @default.