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- W1999431897 abstract "Abstract The EL-3+ is the most advanced of IBM's EL series shaped electron beam lithography tools. The first direct write version of EL-3+ has been installed in IBM's Advanced Semiconductor Technology Center (ASTC) in East Fishkill, New York. This paper describes the novel features of this tool together with early results obtained in the ASTC." @default.
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- W1999431897 date "1992-03-01" @default.
- W1999431897 modified "2023-09-27" @default.
- W1999431897 title "EL-3+ electron beam direct write system" @default.
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- W1999431897 doi "https://doi.org/10.1016/0167-9317(92)90004-b" @default.
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