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- W1999462740 abstract "In the present work, the effect of palladium layers thickness and porous structure of silicon on the hydrogen gas sensor was studied. Hence, simultaneous Pd/CHx/PS/Si and Pd/Si structures have been used as a sensing material to detect H2 gas. Comparison with previous study on CHx/PS/Si structure allows to understanding the effect of pores in silicon material and the contribution of palladium in detection of the hydrogen. Current-voltage and capacitance-voltage characterizations show that the porous silicon structure (Pd/CHx/PS/Si) has higher sensitivity toward H2 gas than that exhibited by silicon sensor despite the presence of palladium (Pd/Si) in both structures. On the other hand, our experiments show that the presence of Pd metal decreases the dynamic response which increases the sensitivity of the sensor. This result conducts, us to optimize the thickness of deposited Pd layer, therefore different Pd layer thickness ranging from [10 nm to 50 nm] was studied. The feature of the best optimized Pd layer deposited on the surface has been characterized by scanning electron microscopy (SEM). Finally it appears that both the catalytic property of Pd metal and the presence of pores were found to strongly influence the sensor response in terms of hydrogen sensitivity and response time." @default.
- W1999462740 created "2016-06-24" @default.
- W1999462740 creator A5027533746 @default.
- W1999462740 creator A5034175830 @default.
- W1999462740 creator A5044511985 @default.
- W1999462740 creator A5078515666 @default.
- W1999462740 date "2009-01-01" @default.
- W1999462740 modified "2023-09-26" @default.
- W1999462740 title "Hydrogen Sensor: Effect of Palladium Thickness and Porous Structure of Silicon" @default.
- W1999462740 doi "https://doi.org/10.4028/www.scientific.net/msf.609.225" @default.
- W1999462740 hasPublicationYear "2009" @default.
- W1999462740 type Work @default.
- W1999462740 sameAs 1999462740 @default.
- W1999462740 citedByCount "1" @default.
- W1999462740 countsByYear W19994627402013 @default.
- W1999462740 crossrefType "journal-article" @default.
- W1999462740 hasAuthorship W1999462740A5027533746 @default.
- W1999462740 hasAuthorship W1999462740A5034175830 @default.
- W1999462740 hasAuthorship W1999462740A5044511985 @default.
- W1999462740 hasAuthorship W1999462740A5078515666 @default.
- W1999462740 hasConcept C113196181 @default.
- W1999462740 hasConcept C127413603 @default.
- W1999462740 hasConcept C159985019 @default.
- W1999462740 hasConcept C161790260 @default.
- W1999462740 hasConcept C171250308 @default.
- W1999462740 hasConcept C178790620 @default.
- W1999462740 hasConcept C185592680 @default.
- W1999462740 hasConcept C191897082 @default.
- W1999462740 hasConcept C192562407 @default.
- W1999462740 hasConcept C26771246 @default.
- W1999462740 hasConcept C2776685891 @default.
- W1999462740 hasConcept C2779227376 @default.
- W1999462740 hasConcept C30262120 @default.
- W1999462740 hasConcept C42360764 @default.
- W1999462740 hasConcept C49040817 @default.
- W1999462740 hasConcept C502130503 @default.
- W1999462740 hasConcept C512968161 @default.
- W1999462740 hasConcept C544153396 @default.
- W1999462740 hasConcept C544956773 @default.
- W1999462740 hasConcept C6648577 @default.
- W1999462740 hasConceptScore W1999462740C113196181 @default.
- W1999462740 hasConceptScore W1999462740C127413603 @default.
- W1999462740 hasConceptScore W1999462740C159985019 @default.
- W1999462740 hasConceptScore W1999462740C161790260 @default.
- W1999462740 hasConceptScore W1999462740C171250308 @default.
- W1999462740 hasConceptScore W1999462740C178790620 @default.
- W1999462740 hasConceptScore W1999462740C185592680 @default.
- W1999462740 hasConceptScore W1999462740C191897082 @default.
- W1999462740 hasConceptScore W1999462740C192562407 @default.
- W1999462740 hasConceptScore W1999462740C26771246 @default.
- W1999462740 hasConceptScore W1999462740C2776685891 @default.
- W1999462740 hasConceptScore W1999462740C2779227376 @default.
- W1999462740 hasConceptScore W1999462740C30262120 @default.
- W1999462740 hasConceptScore W1999462740C42360764 @default.
- W1999462740 hasConceptScore W1999462740C49040817 @default.
- W1999462740 hasConceptScore W1999462740C502130503 @default.
- W1999462740 hasConceptScore W1999462740C512968161 @default.
- W1999462740 hasConceptScore W1999462740C544153396 @default.
- W1999462740 hasConceptScore W1999462740C544956773 @default.
- W1999462740 hasConceptScore W1999462740C6648577 @default.
- W1999462740 hasLocation W19994627401 @default.
- W1999462740 hasOpenAccess W1999462740 @default.
- W1999462740 hasPrimaryLocation W19994627401 @default.
- W1999462740 hasRelatedWork W1979405190 @default.
- W1999462740 hasRelatedWork W1988899213 @default.
- W1999462740 hasRelatedWork W1990242350 @default.
- W1999462740 hasRelatedWork W2010840942 @default.
- W1999462740 hasRelatedWork W2015192314 @default.
- W1999462740 hasRelatedWork W2015314754 @default.
- W1999462740 hasRelatedWork W2017661640 @default.
- W1999462740 hasRelatedWork W2027082136 @default.
- W1999462740 hasRelatedWork W2040804145 @default.
- W1999462740 hasRelatedWork W2054900573 @default.
- W1999462740 hasRelatedWork W2056440060 @default.
- W1999462740 hasRelatedWork W2061123693 @default.
- W1999462740 hasRelatedWork W2073388469 @default.
- W1999462740 hasRelatedWork W2075295372 @default.
- W1999462740 hasRelatedWork W2080505311 @default.
- W1999462740 hasRelatedWork W2160990229 @default.
- W1999462740 hasRelatedWork W2357103143 @default.
- W1999462740 hasRelatedWork W2404605968 @default.
- W1999462740 hasRelatedWork W2885294982 @default.
- W1999462740 hasRelatedWork W3007273531 @default.
- W1999462740 isParatext "false" @default.
- W1999462740 isRetracted "false" @default.
- W1999462740 magId "1999462740" @default.
- W1999462740 workType "article" @default.