Matches in SemOpenAlex for { <https://semopenalex.org/work/W1999542015> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W1999542015 endingPage "211" @default.
- W1999542015 startingPage "209" @default.
- W1999542015 abstract "The authors present the results of investigations on electrical properties of Si/sup +//P/sup +/ and Mg/sup +//P/sup +/ co-implanted InP wafers subjected to rapid isothermal processing. It was found that a significant improvement of activation of Si and Mg in InP can be obtained by P/sup +/ co-implantations and rapid isothermal processing. The annealing cycle was at temperatures from 825 to 875 degrees C for 5 and 14 s. The maximum dopant activation and peak electron concentration for Si/sup +//P/sup +/ coimplants at doses of 1*10/sup 15//cm/sup 2/ were 70% and 5*10/sup 19/ cm/sup 3/. A high hole concentration of 1.1*10/sup 19//cm/sup 3/ was obtained by Mg/sup +//P/sup +/ coimplantations.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W1999542015 created "2016-06-24" @default.
- W1999542015 creator A5032978271 @default.
- W1999542015 creator A5045573181 @default.
- W1999542015 creator A5058034566 @default.
- W1999542015 creator A5068791597 @default.
- W1999542015 creator A5090055143 @default.
- W1999542015 date "1992-01-01" @default.
- W1999542015 modified "2023-09-27" @default.
- W1999542015 title "Rapid isothermal processing of Si/sup +//P/sup +/ and Mg/sup +//P/sup +/ co-implantations into InP" @default.
- W1999542015 cites W1977648980 @default.
- W1999542015 cites W1980315879 @default.
- W1999542015 cites W1981349041 @default.
- W1999542015 cites W2023643382 @default.
- W1999542015 cites W2052204421 @default.
- W1999542015 cites W2062648428 @default.
- W1999542015 cites W2069683603 @default.
- W1999542015 cites W2076383350 @default.
- W1999542015 doi "https://doi.org/10.1109/16.108238" @default.
- W1999542015 hasPublicationYear "1992" @default.
- W1999542015 type Work @default.
- W1999542015 sameAs 1999542015 @default.
- W1999542015 citedByCount "5" @default.
- W1999542015 crossrefType "journal-article" @default.
- W1999542015 hasAuthorship W1999542015A5032978271 @default.
- W1999542015 hasAuthorship W1999542015A5045573181 @default.
- W1999542015 hasAuthorship W1999542015A5058034566 @default.
- W1999542015 hasAuthorship W1999542015A5068791597 @default.
- W1999542015 hasAuthorship W1999542015A5090055143 @default.
- W1999542015 hasConcept C113196181 @default.
- W1999542015 hasConcept C121332964 @default.
- W1999542015 hasConcept C133347239 @default.
- W1999542015 hasConcept C13965031 @default.
- W1999542015 hasConcept C177322064 @default.
- W1999542015 hasConcept C185592680 @default.
- W1999542015 hasConcept C191897082 @default.
- W1999542015 hasConcept C192562407 @default.
- W1999542015 hasConcept C2777855556 @default.
- W1999542015 hasConcept C43617362 @default.
- W1999542015 hasConcept C97355855 @default.
- W1999542015 hasConceptScore W1999542015C113196181 @default.
- W1999542015 hasConceptScore W1999542015C121332964 @default.
- W1999542015 hasConceptScore W1999542015C133347239 @default.
- W1999542015 hasConceptScore W1999542015C13965031 @default.
- W1999542015 hasConceptScore W1999542015C177322064 @default.
- W1999542015 hasConceptScore W1999542015C185592680 @default.
- W1999542015 hasConceptScore W1999542015C191897082 @default.
- W1999542015 hasConceptScore W1999542015C192562407 @default.
- W1999542015 hasConceptScore W1999542015C2777855556 @default.
- W1999542015 hasConceptScore W1999542015C43617362 @default.
- W1999542015 hasConceptScore W1999542015C97355855 @default.
- W1999542015 hasIssue "1" @default.
- W1999542015 hasLocation W19995420151 @default.
- W1999542015 hasOpenAccess W1999542015 @default.
- W1999542015 hasPrimaryLocation W19995420151 @default.
- W1999542015 hasRelatedWork W2029988261 @default.
- W1999542015 hasRelatedWork W2059346919 @default.
- W1999542015 hasRelatedWork W2314881630 @default.
- W1999542015 hasRelatedWork W2347531304 @default.
- W1999542015 hasRelatedWork W2558617580 @default.
- W1999542015 hasRelatedWork W2757214034 @default.
- W1999542015 hasRelatedWork W2899084033 @default.
- W1999542015 hasRelatedWork W3138096539 @default.
- W1999542015 hasRelatedWork W3196600710 @default.
- W1999542015 hasRelatedWork W4205510562 @default.
- W1999542015 hasVolume "39" @default.
- W1999542015 isParatext "false" @default.
- W1999542015 isRetracted "false" @default.
- W1999542015 magId "1999542015" @default.
- W1999542015 workType "article" @default.