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- W1999743316 abstract "Contamination control is a critical issue to the manufacture and maintenance of optical components. Particulates and thin films (organic and inorganic) can degrade optical performance. Current cleaning methods are focusing on aqueous-based cleaning and super- critical fluids. Concurrently, environmentally-conscious manufacturing processes are becoming essential for industrial applications. These manufacturing processes emphasize the reduction of water and chemical consumption and hazardous waste production. In this paper, we will introduce a chemical-free laser assisted process that has demonstrated its capability of removing particulates and films from various surfaces including optical. Since this process works with energy flux and a flowing inert gas, it's readily adaptable and cost effective for many industrial applications." @default.
- W1999743316 created "2016-06-24" @default.
- W1999743316 creator A5061301925 @default.
- W1999743316 date "1994-10-19" @default.
- W1999743316 modified "2023-09-23" @default.
- W1999743316 title "<title>Removal of surface contaminants using a chemical-free laser-assisted process</title>" @default.
- W1999743316 doi "https://doi.org/10.1117/12.190151" @default.
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