Matches in SemOpenAlex for { <https://semopenalex.org/work/W1999889016> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W1999889016 endingPage "258" @default.
- W1999889016 startingPage "254" @default.
- W1999889016 abstract "Silicon-Boron-Carbon-Nitride (SiBCN) thin films were deposited on Si (100) substrates by ECR-type ion beam sputtering at a substrate temperature of 200 ºC, and thermal stability of SiBCN films were investigated at 600 ºC, 700 ºC and 800 ºC in air. A composed Si-B-C (Si plate and B4C target) target was used for the film deposition. The composition and chemical bonding structure of the prepared films were investigated by X-ray photoelectron spectroscopy and Fourier transform infrared spectrometer. Si-N bonds increased with increasing silicon content. Surface roughness of SiBCN films decreased with increasing Si content. Hardness of SiBCN films exhibited up to 22 GPa with increasing silicon content. SiBCN films showed no changes in chemical bonds after heating at 600 ºC. Even after heating at 700 ºC, SiBCN films maintained relatively high hardness, whereas hardness of SiBCN films was quietly reduced after heating at 800 ºC. Thermal stability of SiBCN films was improved with increasing Si content." @default.
- W1999889016 created "2016-06-24" @default.
- W1999889016 creator A5008954760 @default.
- W1999889016 creator A5009385710 @default.
- W1999889016 creator A5044715623 @default.
- W1999889016 creator A5059210421 @default.
- W1999889016 creator A5078362386 @default.
- W1999889016 creator A5089044283 @default.
- W1999889016 creator A5090705541 @default.
- W1999889016 date "2008-01-01" @default.
- W1999889016 modified "2023-10-03" @default.
- W1999889016 title "Thermal Stability of SiBCN Films" @default.
- W1999889016 cites W1964201325 @default.
- W1999889016 cites W2003670979 @default.
- W1999889016 cites W2039875063 @default.
- W1999889016 cites W2064258617 @default.
- W1999889016 cites W2067192340 @default.
- W1999889016 cites W2090451046 @default.
- W1999889016 cites W2095411085 @default.
- W1999889016 cites W2332810776 @default.
- W1999889016 doi "https://doi.org/10.2474/trol.3.254" @default.
- W1999889016 hasPublicationYear "2008" @default.
- W1999889016 type Work @default.
- W1999889016 sameAs 1999889016 @default.
- W1999889016 citedByCount "3" @default.
- W1999889016 countsByYear W19998890162013 @default.
- W1999889016 countsByYear W19998890162018 @default.
- W1999889016 countsByYear W19998890162019 @default.
- W1999889016 crossrefType "journal-article" @default.
- W1999889016 hasAuthorship W1999889016A5008954760 @default.
- W1999889016 hasAuthorship W1999889016A5009385710 @default.
- W1999889016 hasAuthorship W1999889016A5044715623 @default.
- W1999889016 hasAuthorship W1999889016A5059210421 @default.
- W1999889016 hasAuthorship W1999889016A5078362386 @default.
- W1999889016 hasAuthorship W1999889016A5089044283 @default.
- W1999889016 hasAuthorship W1999889016A5090705541 @default.
- W1999889016 hasBestOaLocation W19998890161 @default.
- W1999889016 hasConcept C111368507 @default.
- W1999889016 hasConcept C127313418 @default.
- W1999889016 hasConcept C127413603 @default.
- W1999889016 hasConcept C159985019 @default.
- W1999889016 hasConcept C175708663 @default.
- W1999889016 hasConcept C192562407 @default.
- W1999889016 hasConcept C2777289219 @default.
- W1999889016 hasConcept C2777431650 @default.
- W1999889016 hasConcept C2780243435 @default.
- W1999889016 hasConcept C42360764 @default.
- W1999889016 hasConcept C49040817 @default.
- W1999889016 hasConcept C544956773 @default.
- W1999889016 hasConcept C59061564 @default.
- W1999889016 hasConceptScore W1999889016C111368507 @default.
- W1999889016 hasConceptScore W1999889016C127313418 @default.
- W1999889016 hasConceptScore W1999889016C127413603 @default.
- W1999889016 hasConceptScore W1999889016C159985019 @default.
- W1999889016 hasConceptScore W1999889016C175708663 @default.
- W1999889016 hasConceptScore W1999889016C192562407 @default.
- W1999889016 hasConceptScore W1999889016C2777289219 @default.
- W1999889016 hasConceptScore W1999889016C2777431650 @default.
- W1999889016 hasConceptScore W1999889016C2780243435 @default.
- W1999889016 hasConceptScore W1999889016C42360764 @default.
- W1999889016 hasConceptScore W1999889016C49040817 @default.
- W1999889016 hasConceptScore W1999889016C544956773 @default.
- W1999889016 hasConceptScore W1999889016C59061564 @default.
- W1999889016 hasIssue "5" @default.
- W1999889016 hasLocation W19998890161 @default.
- W1999889016 hasLocation W19998890162 @default.
- W1999889016 hasOpenAccess W1999889016 @default.
- W1999889016 hasPrimaryLocation W19998890161 @default.
- W1999889016 hasRelatedWork W1558007503 @default.
- W1999889016 hasRelatedWork W2078523847 @default.
- W1999889016 hasRelatedWork W2124703953 @default.
- W1999889016 hasRelatedWork W2769802134 @default.
- W1999889016 hasRelatedWork W2906936695 @default.
- W1999889016 hasRelatedWork W2980266865 @default.
- W1999889016 hasRelatedWork W3038420466 @default.
- W1999889016 hasRelatedWork W3184849194 @default.
- W1999889016 hasRelatedWork W4244960656 @default.
- W1999889016 hasRelatedWork W4309577337 @default.
- W1999889016 hasVolume "3" @default.
- W1999889016 isParatext "false" @default.
- W1999889016 isRetracted "false" @default.
- W1999889016 magId "1999889016" @default.
- W1999889016 workType "article" @default.