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- W1999890636 abstract "The effectiveness of reaction-diffusion mechanisms on the formation of nanoscale polymer films in the chemical shrink process is investigated by a two-dimensional model. The model includes three mechanisms: the catalytic cross-linking reaction of water-soluble polymers and cross-linkers, the diffusion of photoacids, and the trapping of photoacids by the cross-linked polymers. It is found that, although the cross-linking reaction is the vital mechanism for the chemical shrink process, it is much less effective on the formation of nanoscale polymer films than the photoacids diffusion and trapping mechanisms." @default.
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- W1999890636 date "2005-10-01" @default.
- W1999890636 modified "2023-09-25" @default.
- W1999890636 title "Reaction-diffusion mechanisms for the chemical shrink process of nanofabrication" @default.
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- W1999890636 doi "https://doi.org/10.1016/j.cplett.2005.08.078" @default.
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