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- W2000168504 abstract "The experimental method of micro-/nanotensile testing for extracting the mechanical properties of small volumes ofmaterials ( e.g. free-standing thin films) has gained more and more interest, since it provides an effective way to evaluatethe actual material properties without any pre-assumptions, and consequently its results can be used as a reference forverifying other material testing methods such as nanoindentation testing, laser acoustic method, etc. As one of the keycomponents within a nano-tensile testing system, here a MEMS-based nano-force actuator is presented, which isdeveloped on the basis of an electrostatic lateral comb-drive, having an output force resolution up to 3 nN with amaximum output force up to the mN range. A fixed gripper is integrated into the nano-force actuator, with which a free-standingthin film specimen with matched holder can be easily coupled and tested. Design and numerical simulation ofthe nano-force actuator with the help of finite element analysis (FEA) are detailed. A calibration system is developed,which employs a single-frequency laser interferometer as an SI-traceable standard for the determination of the actualdisplacement-to-square-voltage ratio (d/ V 2 ) of a prototype of the actuator. Calibration results reveal that the actualperformance of the prototype coincides quite well with the designed specifications. With atomic force microscope(AFM) the error sources within the prototype are further investigated." @default.
- W2000168504 created "2016-06-24" @default.
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- W2000168504 date "2008-04-25" @default.
- W2000168504 modified "2023-09-23" @default.
- W2000168504 title "A microelectromechanical force actuator for nano-tensile testing system" @default.
- W2000168504 doi "https://doi.org/10.1117/12.780400" @default.
- W2000168504 hasPublicationYear "2008" @default.
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