Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000169069> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2000169069 endingPage "690" @default.
- W2000169069 startingPage "686" @default.
- W2000169069 abstract "Abstract The growth characteristics in the initial stage of Ge epitaxy on the Si(1 0 0) epitaxial buffer layer have been investigated by ultraclean LPCVD at 350°C using GeH 4 at 0.2 and 12 Pa with H 2 or Ar as a carrier gas. When H 2 was used as a carrier gas, an incubation period was found (about 12 min at 0.2 Pa), during which Ge nuclei were formed on Si. After the incubation period layer growth of Ge film began. In the case where Ar was used as a carrier gas, the incubation period was drastically reduced without any apparent change in the layer growth rate. The nucleus size was larger and the nucleus density was lower in the case of H 2 as carrier gas. These growth characteristics are believed to be caused by the suppression of adsorption and/or decomposition of GeH 4 on the H-terminated Si surface in the case of H 2 ." @default.
- W2000169069 created "2016-06-24" @default.
- W2000169069 creator A5012163852 @default.
- W2000169069 creator A5023247939 @default.
- W2000169069 creator A5026856725 @default.
- W2000169069 creator A5032797685 @default.
- W2000169069 creator A5010213443 @default.
- W2000169069 date "1997-04-01" @default.
- W2000169069 modified "2023-10-16" @default.
- W2000169069 title "Initial growth characteristics of germanium on silicon in LPCVD using germane gas" @default.
- W2000169069 cites W1977894028 @default.
- W2000169069 cites W2008465994 @default.
- W2000169069 cites W2018344673 @default.
- W2000169069 cites W2083177328 @default.
- W2000169069 cites W2087037537 @default.
- W2000169069 doi "https://doi.org/10.1016/s0022-0248(97)00034-1" @default.
- W2000169069 hasPublicationYear "1997" @default.
- W2000169069 type Work @default.
- W2000169069 sameAs 2000169069 @default.
- W2000169069 citedByCount "18" @default.
- W2000169069 countsByYear W20001690692013 @default.
- W2000169069 countsByYear W20001690692015 @default.
- W2000169069 countsByYear W20001690692018 @default.
- W2000169069 countsByYear W20001690692019 @default.
- W2000169069 countsByYear W20001690692022 @default.
- W2000169069 crossrefType "journal-article" @default.
- W2000169069 hasAuthorship W2000169069A5010213443 @default.
- W2000169069 hasAuthorship W2000169069A5012163852 @default.
- W2000169069 hasAuthorship W2000169069A5023247939 @default.
- W2000169069 hasAuthorship W2000169069A5026856725 @default.
- W2000169069 hasAuthorship W2000169069A5032797685 @default.
- W2000169069 hasConcept C178790620 @default.
- W2000169069 hasConcept C185592680 @default.
- W2000169069 hasConcept C2776154250 @default.
- W2000169069 hasConcept C2909614401 @default.
- W2000169069 hasConcept C544956773 @default.
- W2000169069 hasConcept C550623735 @default.
- W2000169069 hasConcept C57410435 @default.
- W2000169069 hasConceptScore W2000169069C178790620 @default.
- W2000169069 hasConceptScore W2000169069C185592680 @default.
- W2000169069 hasConceptScore W2000169069C2776154250 @default.
- W2000169069 hasConceptScore W2000169069C2909614401 @default.
- W2000169069 hasConceptScore W2000169069C544956773 @default.
- W2000169069 hasConceptScore W2000169069C550623735 @default.
- W2000169069 hasConceptScore W2000169069C57410435 @default.
- W2000169069 hasIssue "1-4" @default.
- W2000169069 hasLocation W20001690691 @default.
- W2000169069 hasOpenAccess W2000169069 @default.
- W2000169069 hasPrimaryLocation W20001690691 @default.
- W2000169069 hasRelatedWork W1989660365 @default.
- W2000169069 hasRelatedWork W2022104235 @default.
- W2000169069 hasRelatedWork W2022851728 @default.
- W2000169069 hasRelatedWork W2046239846 @default.
- W2000169069 hasRelatedWork W2046311189 @default.
- W2000169069 hasRelatedWork W2096052597 @default.
- W2000169069 hasRelatedWork W2129598227 @default.
- W2000169069 hasRelatedWork W2526484126 @default.
- W2000169069 hasRelatedWork W3120152692 @default.
- W2000169069 hasRelatedWork W2141830666 @default.
- W2000169069 hasVolume "174" @default.
- W2000169069 isParatext "false" @default.
- W2000169069 isRetracted "false" @default.
- W2000169069 magId "2000169069" @default.
- W2000169069 workType "article" @default.