FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000172671> ?p ?o ?g. }

• W2000172671 abstract "An electrical asymmetry in capacitive rf discharges with a symmetrical electrode configuration can be induced by driving the discharge with a fundamental frequency and its second harmonic. For equal amplitudes of the applied voltage waveforms, it has been demonstrated by modeling, simulation, and experiments that this electrical asymmetry effect (EAE) leads to the generation of a variable dc self-bias that depends almost linearly on the phase angle between the driving voltage signals. Here, the dependence of the dc self-bias generated by the EAE on the choice of the voltage amplitudes, i.e., the ratio A of high to low frequency amplitude, is investigated experimentally as well as by using an analytical model and a particle-in-cell simulation. It is found that (i) the strongest electrical asymmetry is induced for A&lt;1 at pressures ranging from 6 to 100 Pa and that (ii) around this optimum voltage ratio the dc self-bias normalized to the sum of both voltage amplitudes is fairly insensitive to changes of A. Thus, by choosing the optimum voltage ratio, the EAE is optimized: The ion energy can be changed over a broader energy range and a high degree of process stability with respect to small changes in the applied voltages is expected." @default.
• W2000172671 created "2016-06-24" @default.
• W2000172671 creator A5005908187 @default.
• W2000172671 creator A5010518216 @default.
• W2000172671 creator A5030507867 @default.
• W2000172671 creator A5053790526 @default.
• W2000172671 date "2009-09-15" @default.
• W2000172671 modified "2023-10-18" @default.
• W2000172671 title "Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model" @default.
• W2000172671 cites W1972372311 @default.
• W2000172671 cites W1989209593 @default.
• W2000172671 cites W2006634883 @default.
• W2000172671 cites W2007185414 @default.
• W2000172671 cites W2016551723 @default.
• W2000172671 cites W2017981825 @default.
• W2000172671 cites W2018972210 @default.
• W2000172671 cites W2020045108 @default.
• W2000172671 cites W2020903072 @default.
• W2000172671 cites W2030583379 @default.
• W2000172671 cites W2031688765 @default.
• W2000172671 cites W2044798880 @default.
• W2000172671 cites W2050668733 @default.
• W2000172671 cites W2060600644 @default.
• W2000172671 cites W2065455126 @default.
• W2000172671 cites W2065950714 @default.
• W2000172671 cites W2080461130 @default.
• W2000172671 cites W2090851454 @default.
• W2000172671 cites W2091099831 @default.
• W2000172671 cites W2096940112 @default.
• W2000172671 cites W2098537057 @default.
• W2000172671 cites W2104062774 @default.
• W2000172671 cites W2106582005 @default.
• W2000172671 cites W2123761964 @default.
• W2000172671 cites W2150759874 @default.
• W2000172671 cites W2151160326 @default.
• W2000172671 cites W2164335666 @default.
• W2000172671 cites W2167562880 @default.
• W2000172671 cites W2169963373 @default.
• W2000172671 cites W2171206964 @default.
• W2000172671 doi "https://doi.org/10.1063/1.3223310" @default.
• W2000172671 hasPublicationYear "2009" @default.
• W2000172671 type Work @default.
• W2000172671 sameAs 2000172671 @default.
• W2000172671 citedByCount "75" @default.
• W2000172671 countsByYear W20001726712012 @default.
• W2000172671 countsByYear W20001726712013 @default.
• W2000172671 countsByYear W20001726712014 @default.
• W2000172671 countsByYear W20001726712015 @default.
• W2000172671 countsByYear W20001726712016 @default.
• W2000172671 countsByYear W20001726712017 @default.
• W2000172671 countsByYear W20001726712018 @default.
• W2000172671 countsByYear W20001726712019 @default.
• W2000172671 countsByYear W20001726712020 @default.
• W2000172671 countsByYear W20001726712021 @default.
• W2000172671 countsByYear W20001726712022 @default.
• W2000172671 countsByYear W20001726712023 @default.
• W2000172671 crossrefType "journal-article" @default.
• W2000172671 hasAuthorship W2000172671A5005908187 @default.
• W2000172671 hasAuthorship W2000172671A5010518216 @default.
• W2000172671 hasAuthorship W2000172671A5030507867 @default.
• W2000172671 hasAuthorship W2000172671A5053790526 @default.
• W2000172671 hasConcept C119599485 @default.
• W2000172671 hasConcept C120665830 @default.
• W2000172671 hasConcept C121332964 @default.
• W2000172671 hasConcept C127413603 @default.
• W2000172671 hasConcept C165801399 @default.
• W2000172671 hasConcept C180205008 @default.
• W2000172671 hasConcept C184779094 @default.
• W2000172671 hasConcept C192562407 @default.
• W2000172671 hasConcept C197424946 @default.
• W2000172671 hasConcept C206755178 @default.
• W2000172671 hasConcept C30475298 @default.
• W2000172671 hasConcept C38976095 @default.
• W2000172671 hasConcept C62520636 @default.
• W2000172671 hasConcept C74064498 @default.
• W2000172671 hasConceptScore W2000172671C119599485 @default.
• W2000172671 hasConceptScore W2000172671C120665830 @default.
• W2000172671 hasConceptScore W2000172671C121332964 @default.
• W2000172671 hasConceptScore W2000172671C127413603 @default.
• W2000172671 hasConceptScore W2000172671C165801399 @default.
• W2000172671 hasConceptScore W2000172671C180205008 @default.
• W2000172671 hasConceptScore W2000172671C184779094 @default.
• W2000172671 hasConceptScore W2000172671C192562407 @default.
• W2000172671 hasConceptScore W2000172671C197424946 @default.
• W2000172671 hasConceptScore W2000172671C206755178 @default.
• W2000172671 hasConceptScore W2000172671C30475298 @default.
• W2000172671 hasConceptScore W2000172671C38976095 @default.
• W2000172671 hasConceptScore W2000172671C62520636 @default.
• W2000172671 hasConceptScore W2000172671C74064498 @default.
• W2000172671 hasIssue "6" @default.
• W2000172671 hasLocation W20001726711 @default.
• W2000172671 hasOpenAccess W2000172671 @default.
• W2000172671 hasPrimaryLocation W20001726711 @default.
• W2000172671 hasRelatedWork W1513847886 @default.
• W2000172671 hasRelatedWork W1970214368 @default.
• W2000172671 hasRelatedWork W2014413001 @default.
• W2000172671 hasRelatedWork W2031799201 @default.
• W2000172671 hasRelatedWork W2086395407 @default.
• W2000172671 hasRelatedWork W2087833619 @default.
• W2000172671 hasRelatedWork W2092151381 @default.

• next