Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000191908> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2000191908 endingPage "63" @default.
- W2000191908 startingPage "56" @default.
- W2000191908 abstract "IGZO thin films have been prepared by RF magnetron sputtering. The structural, electrical and optical properties of the IGZO thin films have been investigated as a function of deposition condition. XRD analysis of IGZO thin films showed a typical crystallographic orientation with c-axis perpendicular regardless of deposition conditions. The carrier mobility, carrier concentration and resistivity of the IGZO films sputtered at 200 W, 1mTorr and <TEX>$300^{circ}C$</TEX> were <TEX>$28.5cm^2/V{cdot}sec$</TEX>, <TEX>$2.6{times}10^{20}cm^3$</TEX>, <TEX>$8.8{times}10^{-4}{Omega}{cdot}cm$</TEX> respectively. The optical transmittance were higher than 80% at visible region regardless of the deposition conditions under the experiments above, and specifically higher than 90% at wave length over 500 nm. The absorption edge was shifted to shorter wavelength with increase of carrier concentration." @default.
- W2000191908 created "2016-06-24" @default.
- W2000191908 creator A5060018313 @default.
- W2000191908 creator A5064268389 @default.
- W2000191908 creator A5089960364 @default.
- W2000191908 date "2013-01-01" @default.
- W2000191908 modified "2023-09-29" @default.
- W2000191908 title "The Properties of ZnO:Ga,In(IGZO) Thin Films Prepared by RF Magnetron Sputtering" @default.
- W2000191908 cites W2044562203 @default.
- W2000191908 cites W2060474026 @default.
- W2000191908 cites W2063443451 @default.
- W2000191908 cites W2070023439 @default.
- W2000191908 cites W2080182970 @default.
- W2000191908 cites W2080240036 @default.
- W2000191908 cites W2086281597 @default.
- W2000191908 doi "https://doi.org/10.4313/jkem.2013.26.1.56" @default.
- W2000191908 hasPublicationYear "2013" @default.
- W2000191908 type Work @default.
- W2000191908 sameAs 2000191908 @default.
- W2000191908 citedByCount "0" @default.
- W2000191908 crossrefType "journal-article" @default.
- W2000191908 hasAuthorship W2000191908A5060018313 @default.
- W2000191908 hasAuthorship W2000191908A5064268389 @default.
- W2000191908 hasAuthorship W2000191908A5089960364 @default.
- W2000191908 hasBestOaLocation W20001919081 @default.
- W2000191908 hasConcept C113196181 @default.
- W2000191908 hasConcept C119599485 @default.
- W2000191908 hasConcept C123408415 @default.
- W2000191908 hasConcept C127413603 @default.
- W2000191908 hasConcept C150493377 @default.
- W2000191908 hasConcept C151730666 @default.
- W2000191908 hasConcept C171250308 @default.
- W2000191908 hasConcept C181966813 @default.
- W2000191908 hasConcept C185592680 @default.
- W2000191908 hasConcept C19067145 @default.
- W2000191908 hasConcept C192562407 @default.
- W2000191908 hasConcept C22423302 @default.
- W2000191908 hasConcept C2816523 @default.
- W2000191908 hasConcept C43617362 @default.
- W2000191908 hasConcept C49040817 @default.
- W2000191908 hasConcept C50792271 @default.
- W2000191908 hasConcept C61427134 @default.
- W2000191908 hasConcept C6260449 @default.
- W2000191908 hasConcept C64297162 @default.
- W2000191908 hasConcept C69990965 @default.
- W2000191908 hasConcept C86803240 @default.
- W2000191908 hasConceptScore W2000191908C113196181 @default.
- W2000191908 hasConceptScore W2000191908C119599485 @default.
- W2000191908 hasConceptScore W2000191908C123408415 @default.
- W2000191908 hasConceptScore W2000191908C127413603 @default.
- W2000191908 hasConceptScore W2000191908C150493377 @default.
- W2000191908 hasConceptScore W2000191908C151730666 @default.
- W2000191908 hasConceptScore W2000191908C171250308 @default.
- W2000191908 hasConceptScore W2000191908C181966813 @default.
- W2000191908 hasConceptScore W2000191908C185592680 @default.
- W2000191908 hasConceptScore W2000191908C19067145 @default.
- W2000191908 hasConceptScore W2000191908C192562407 @default.
- W2000191908 hasConceptScore W2000191908C22423302 @default.
- W2000191908 hasConceptScore W2000191908C2816523 @default.
- W2000191908 hasConceptScore W2000191908C43617362 @default.
- W2000191908 hasConceptScore W2000191908C49040817 @default.
- W2000191908 hasConceptScore W2000191908C50792271 @default.
- W2000191908 hasConceptScore W2000191908C61427134 @default.
- W2000191908 hasConceptScore W2000191908C6260449 @default.
- W2000191908 hasConceptScore W2000191908C64297162 @default.
- W2000191908 hasConceptScore W2000191908C69990965 @default.
- W2000191908 hasConceptScore W2000191908C86803240 @default.
- W2000191908 hasIssue "1" @default.
- W2000191908 hasLocation W20001919081 @default.
- W2000191908 hasLocation W20001919082 @default.
- W2000191908 hasOpenAccess W2000191908 @default.
- W2000191908 hasPrimaryLocation W20001919081 @default.
- W2000191908 hasRelatedWork W1966891875 @default.
- W2000191908 hasRelatedWork W1970165396 @default.
- W2000191908 hasRelatedWork W1971514277 @default.
- W2000191908 hasRelatedWork W1976482905 @default.
- W2000191908 hasRelatedWork W1997064051 @default.
- W2000191908 hasRelatedWork W2001818127 @default.
- W2000191908 hasRelatedWork W2024146243 @default.
- W2000191908 hasRelatedWork W2026057449 @default.
- W2000191908 hasRelatedWork W2036779131 @default.
- W2000191908 hasRelatedWork W2039344878 @default.
- W2000191908 hasRelatedWork W2046784739 @default.
- W2000191908 hasRelatedWork W2112046331 @default.
- W2000191908 hasRelatedWork W2285630158 @default.
- W2000191908 hasRelatedWork W2313328828 @default.
- W2000191908 hasRelatedWork W2347376453 @default.
- W2000191908 hasRelatedWork W2350111910 @default.
- W2000191908 hasRelatedWork W2358806464 @default.
- W2000191908 hasRelatedWork W2373618590 @default.
- W2000191908 hasRelatedWork W2800644575 @default.
- W2000191908 hasRelatedWork W3144216649 @default.
- W2000191908 hasVolume "26" @default.
- W2000191908 isParatext "false" @default.
- W2000191908 isRetracted "false" @default.
- W2000191908 magId "2000191908" @default.
- W2000191908 workType "article" @default.