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- W2000193790 abstract "This paper describes investigations on process induced crystal defects in n-type silicon material of both Czochralski- and zone-floating-techniques (dislocation-free). The heating and cooling processes, the oxide thickness, mechanical stresses near the diffusion windows, the mask pattern geometry concerning diffusion and the surface concentration of the doping material have been specially investigated. The influence of those technological parameters on the generation of crystal defects in the production of electronic devices is investigated and discussed.Es wurden Untersuchungen zur prozesinduzierten Bildung von Strukturdefekten fur n-leitendes versetzungsfreies Czochralski- und zone-floating-Silizium durchgefuhrt. — Besondere Beachtung fanden die Aufheiz- und Abkuhlvorgange, die Oxidschichtdicke, mechanische Spannungen an den Deckschicht-Substratubergangen der Diffusionsfenster, Diffusionsmaskengeometrie und die Oberflachenkonzentration bei der Diffusion. Der Einflus der genannten technologischen Parameter auf die Bildung von Gefugedefekten im Bauelementeprozes wird untersucht und diskutiert." @default.
- W2000193790 created "2016-06-24" @default.
- W2000193790 creator A5058693565 @default.
- W2000193790 creator A5083218918 @default.
- W2000193790 date "1979-01-01" @default.
- W2000193790 modified "2023-09-23" @default.
- W2000193790 title "Process Induced Crystal Defects in Dislocation-Free n-Type Silicon Material" @default.
- W2000193790 cites W1978918623 @default.
- W2000193790 cites W2014897815 @default.
- W2000193790 cites W2055596020 @default.
- W2000193790 doi "https://doi.org/10.1002/crat.19790140706" @default.
- W2000193790 hasPublicationYear "1979" @default.
- W2000193790 type Work @default.
- W2000193790 sameAs 2000193790 @default.
- W2000193790 citedByCount "0" @default.
- W2000193790 crossrefType "journal-article" @default.
- W2000193790 hasAuthorship W2000193790A5058693565 @default.
- W2000193790 hasAuthorship W2000193790A5083218918 @default.
- W2000193790 hasConcept C111106434 @default.
- W2000193790 hasConcept C121332964 @default.
- W2000193790 hasConcept C159122135 @default.
- W2000193790 hasConcept C159985019 @default.
- W2000193790 hasConcept C171250308 @default.
- W2000193790 hasConcept C185592680 @default.
- W2000193790 hasConcept C191897082 @default.
- W2000193790 hasConcept C192562407 @default.
- W2000193790 hasConcept C199360897 @default.
- W2000193790 hasConcept C2781285689 @default.
- W2000193790 hasConcept C41008148 @default.
- W2000193790 hasConcept C49040817 @default.
- W2000193790 hasConcept C544956773 @default.
- W2000193790 hasConcept C57863236 @default.
- W2000193790 hasConcept C69357855 @default.
- W2000193790 hasConcept C8010536 @default.
- W2000193790 hasConcept C97355855 @default.
- W2000193790 hasConceptScore W2000193790C111106434 @default.
- W2000193790 hasConceptScore W2000193790C121332964 @default.
- W2000193790 hasConceptScore W2000193790C159122135 @default.
- W2000193790 hasConceptScore W2000193790C159985019 @default.
- W2000193790 hasConceptScore W2000193790C171250308 @default.
- W2000193790 hasConceptScore W2000193790C185592680 @default.
- W2000193790 hasConceptScore W2000193790C191897082 @default.
- W2000193790 hasConceptScore W2000193790C192562407 @default.
- W2000193790 hasConceptScore W2000193790C199360897 @default.
- W2000193790 hasConceptScore W2000193790C2781285689 @default.
- W2000193790 hasConceptScore W2000193790C41008148 @default.
- W2000193790 hasConceptScore W2000193790C49040817 @default.
- W2000193790 hasConceptScore W2000193790C544956773 @default.
- W2000193790 hasConceptScore W2000193790C57863236 @default.
- W2000193790 hasConceptScore W2000193790C69357855 @default.
- W2000193790 hasConceptScore W2000193790C8010536 @default.
- W2000193790 hasConceptScore W2000193790C97355855 @default.
- W2000193790 hasLocation W20001937901 @default.
- W2000193790 hasOpenAccess W2000193790 @default.
- W2000193790 hasPrimaryLocation W20001937901 @default.
- W2000193790 hasRelatedWork W1963834728 @default.
- W2000193790 hasRelatedWork W1971863420 @default.
- W2000193790 hasRelatedWork W1981067452 @default.
- W2000193790 hasRelatedWork W1989331381 @default.
- W2000193790 hasRelatedWork W1989648981 @default.
- W2000193790 hasRelatedWork W1992617649 @default.
- W2000193790 hasRelatedWork W2000906465 @default.
- W2000193790 hasRelatedWork W2007994827 @default.
- W2000193790 hasRelatedWork W2011035778 @default.
- W2000193790 hasRelatedWork W2012418286 @default.
- W2000193790 hasRelatedWork W2021785398 @default.
- W2000193790 hasRelatedWork W2032512083 @default.
- W2000193790 hasRelatedWork W2045717457 @default.
- W2000193790 hasRelatedWork W2074616308 @default.
- W2000193790 hasRelatedWork W2079898192 @default.
- W2000193790 hasRelatedWork W2107035686 @default.
- W2000193790 hasRelatedWork W2121831096 @default.
- W2000193790 hasRelatedWork W2127792654 @default.
- W2000193790 hasRelatedWork W2142010800 @default.
- W2000193790 hasRelatedWork W2154101913 @default.
- W2000193790 isParatext "false" @default.
- W2000193790 isRetracted "false" @default.
- W2000193790 magId "2000193790" @default.
- W2000193790 workType "article" @default.