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• W2000217316 abstract "A microelectronic device, designed from multiple structured thin films of different materials deposited on each other, can have a very complex shape. Such a structure can show relatively high residual stresses, which lead to malfunctions and a decrease in lifetime of the device. In this paper a numerical method relying on an inverse optimization algorithm and a finite element (FE) simulation for calculating these stresses is introduced. The evaluation of the residual stress distribution makes use of the so-called ion beam layer removal (ILR) method, where layers of material are removed from a specific region of a micro-cantilever. As a result it is shown that a thin film of material, deposited on a substrate, is occupied by evolving residual stresses through the layer thickness. The calculations and analysis are done automatically using an in-house developed graphical user interface (GUI)." @default.
• W2000217316 created "2016-06-24" @default.
• W2000217316 creator A5021346418 @default.
• W2000217316 creator A5025664616 @default.
• W2000217316 creator A5025927926 @default.
• W2000217316 creator A5055651072 @default.
• W2000217316 creator A5074354934 @default.
• W2000217316 creator A5083823348 @default.
• W2000217316 creator A5090513591 @default.
• W2000217316 date "2014-04-01" @default.
• W2000217316 modified "2023-10-02" @default.
• W2000217316 title "Evaluation of the residual stress distribution in thin films by means of the ion beam layer removal method" @default.
• W2000217316 cites W1965880170 @default.
• W2000217316 cites W1979133789 @default.
• W2000217316 cites W1983281588 @default.
• W2000217316 cites W2003543560 @default.
• W2000217316 cites W2006328213 @default.
• W2000217316 cites W2008612409 @default.
• W2000217316 cites W2016832370 @default.
• W2000217316 cites W2018046396 @default.
• W2000217316 cites W2020081011 @default.
• W2000217316 cites W2020722869 @default.
• W2000217316 cites W2033576776 @default.
• W2000217316 cites W2038667420 @default.
• W2000217316 cites W2063650256 @default.
• W2000217316 cites W2065851802 @default.
• W2000217316 cites W2073124916 @default.
• W2000217316 cites W2080545682 @default.
• W2000217316 cites W2081887802 @default.
• W2000217316 cites W2082067618 @default.
• W2000217316 cites W2087070363 @default.
• W2000217316 cites W2088877497 @default.
• W2000217316 cites W2092135689 @default.
• W2000217316 cites W2092835868 @default.
• W2000217316 cites W2157763436 @default.
• W2000217316 cites W2256578114 @default.
• W2000217316 doi "https://doi.org/10.1109/eurosime.2014.6813785" @default.
• W2000217316 hasPublicationYear "2014" @default.
• W2000217316 type Work @default.
• W2000217316 sameAs 2000217316 @default.
• W2000217316 citedByCount "2" @default.
• W2000217316 countsByYear W20002173162015 @default.
• W2000217316 countsByYear W20002173162016 @default.
• W2000217316 crossrefType "proceedings-article" @default.
• W2000217316 hasAuthorship W2000217316A5021346418 @default.
• W2000217316 hasAuthorship W2000217316A5025664616 @default.
• W2000217316 hasAuthorship W2000217316A5025927926 @default.
• W2000217316 hasAuthorship W2000217316A5055651072 @default.
• W2000217316 hasAuthorship W2000217316A5074354934 @default.
• W2000217316 hasAuthorship W2000217316A5083823348 @default.
• W2000217316 hasAuthorship W2000217316A5090513591 @default.
• W2000217316 hasConcept C111368507 @default.
• W2000217316 hasConcept C11413529 @default.
• W2000217316 hasConcept C127313418 @default.
• W2000217316 hasConcept C127413603 @default.
• W2000217316 hasConcept C135628077 @default.
• W2000217316 hasConcept C138885662 @default.
• W2000217316 hasConcept C141354745 @default.
• W2000217316 hasConcept C155512373 @default.
• W2000217316 hasConcept C159985019 @default.
• W2000217316 hasConcept C168834538 @default.
• W2000217316 hasConcept C171250308 @default.
• W2000217316 hasConcept C187937830 @default.
• W2000217316 hasConcept C19067145 @default.
• W2000217316 hasConcept C192562407 @default.
• W2000217316 hasConcept C21036866 @default.
• W2000217316 hasConcept C2777289219 @default.
• W2000217316 hasConcept C2779227376 @default.
• W2000217316 hasConcept C37292000 @default.
• W2000217316 hasConcept C41008148 @default.
• W2000217316 hasConcept C41895202 @default.
• W2000217316 hasConcept C49040817 @default.
• W2000217316 hasConcept C66938386 @default.
• W2000217316 hasConceptScore W2000217316C111368507 @default.
• W2000217316 hasConceptScore W2000217316C11413529 @default.
• W2000217316 hasConceptScore W2000217316C127313418 @default.
• W2000217316 hasConceptScore W2000217316C127413603 @default.
• W2000217316 hasConceptScore W2000217316C135628077 @default.
• W2000217316 hasConceptScore W2000217316C138885662 @default.
• W2000217316 hasConceptScore W2000217316C141354745 @default.
• W2000217316 hasConceptScore W2000217316C155512373 @default.
• W2000217316 hasConceptScore W2000217316C159985019 @default.
• W2000217316 hasConceptScore W2000217316C168834538 @default.
• W2000217316 hasConceptScore W2000217316C171250308 @default.
• W2000217316 hasConceptScore W2000217316C187937830 @default.
• W2000217316 hasConceptScore W2000217316C19067145 @default.
• W2000217316 hasConceptScore W2000217316C192562407 @default.
• W2000217316 hasConceptScore W2000217316C21036866 @default.
• W2000217316 hasConceptScore W2000217316C2777289219 @default.
• W2000217316 hasConceptScore W2000217316C2779227376 @default.
• W2000217316 hasConceptScore W2000217316C37292000 @default.
• W2000217316 hasConceptScore W2000217316C41008148 @default.
• W2000217316 hasConceptScore W2000217316C41895202 @default.
• W2000217316 hasConceptScore W2000217316C49040817 @default.
• W2000217316 hasConceptScore W2000217316C66938386 @default.
• W2000217316 hasLocation W20002173161 @default.
• W2000217316 hasOpenAccess W2000217316 @default.
• W2000217316 hasPrimaryLocation W20002173161 @default.
• W2000217316 hasRelatedWork W1491455285 @default.
• W2000217316 hasRelatedWork W2022248994 @default.

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