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- W2000217460 abstract "An oxygen jet placed near the target during plasma-assisted laser deposition produces a strong atomic oxygen beam with kinetic energies of 5.6 eV, simultaneous with the laser-induced atomic beams of Ba, Cu, and Y from the target. All atomic beams can be well characterized by a supersonic expansion mechanism. The behavior of the velocity distributions was studied as a function of the distance from the target and laser energy fluence. A target-substrate separation of 7 cm was found to be optimum in terms of producing the best as-deposited films. At that distance, the velocity distributions of all atomic beams become nearly the same." @default.
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- W2000217460 date "1989-03-06" @default.
- W2000217460 modified "2023-09-26" @default.
- W2000217460 title "Role of the oxygen atomic beam in low-temperature growth of superconducting films by laser deposition" @default.
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- W2000217460 doi "https://doi.org/10.1063/1.100777" @default.
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