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- W2000227783 abstract "Simple models for the chemical vapor deposition of carbide films are developed and their dynamic behavior is analyzed. By performing a parameter search, certain sets of model parameters were identified that yield stable limit cycles for the gas phase reagent concentrations at the substrate surface. The concentration oscillations are seen to arise from a balance between reagent supply to the substrate and concentration-dependent consumption terms. The changes in the surface concentration could alter the observed deposit from one form to another, and could lead to the laminar structure observed in certain carbide coatings." @default.
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- W2000227783 date "1992-01-01" @default.
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- W2000227783 title "Sustained oscillations in simple models for chemical vapor deposition" @default.
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- W2000227783 doi "https://doi.org/10.1016/0040-6090(92)90102-h" @default.
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