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- W2000231808 abstract "A diffusion theory is proposed for the description of the recoil implantation process. Diffusion coefficient calculations taking into account of recoil atom interaction with projectile ions and cascade atoms, are considered. The dependence of the diffusion coefficient on the projectile ion mass and energy is analyzed. It is shown that the general role in the stimulation of recoil migration is caused by the cascade processes. [Russian Text Ignored]." @default.
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- W2000231808 date "1989-12-16" @default.
- W2000231808 modified "2023-09-28" @default.
- W2000231808 title "Theory of the recoil implantation" @default.
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- W2000231808 doi "https://doi.org/10.1002/pssa.2211160213" @default.
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