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- W2000237497 abstract "The defect structure of conformally grown Si films is investigated using electron microscopy techniques. Twins, stacking faults and dislocations are evidenced, mainly located at the different Si/SiO 2 interfaces. A qualitative model of defect generation is presented which suggests that these different defects mainly originate from differential thermal expansion problems associated to the “micro-roughness” of the Si/SiO 2 lateral interfaces." @default.
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- W2000237497 date "1990-11-01" @default.
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- W2000237497 title "Structural Characterizations of Conformally Grown (100) Si Films" @default.
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- W2000237497 doi "https://doi.org/10.1143/jjap.29.l1943" @default.
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