Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000241838> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2000241838 endingPage "294" @default.
- W2000241838 startingPage "289" @default.
- W2000241838 abstract "A silicon beam resonator has been fabricated by using the bulk surface micromachining, and mechanical beam vibrations have been directly evaluated with the laser-Doppler technique. The in-plane vibration, caused by the electrostatic force exerted on a gap between the beam and the drive electrode, and the out-of-plane vibration, caused by the asymmetrical electric field around the beam, have been compared with each other. The measured resonant frequencies have well agreed with those calculated by a simulator. The air damping effect has been measured under various vacuum conditions. The result suggests the fabricated resonators should be packaged under 500 Pa for the air-damping-free vibration. The electrical characterization using an impedance analyzer has shown that the impedance and capacitance have depended on the operating bias voltage, while the resonant frequency has been slightly varied by the bias voltage. These electrical characteristics have been compared with the mechanical vibration behaviors. It has indicated that the qualitative similarity between them has been shown, although the 4 to 5% resonant frequency increase has been observed." @default.
- W2000241838 created "2016-06-24" @default.
- W2000241838 creator A5013323494 @default.
- W2000241838 creator A5033144050 @default.
- W2000241838 creator A5038686861 @default.
- W2000241838 creator A5069536133 @default.
- W2000241838 date "2009-01-01" @default.
- W2000241838 modified "2023-09-25" @default.
- W2000241838 title "Characteristics of Three-Dimensional Resonant Vibration in a MEMS Silicon Beam Resonator" @default.
- W2000241838 cites W2105093937 @default.
- W2000241838 cites W2538396098 @default.
- W2000241838 cites W2621919695 @default.
- W2000241838 doi "https://doi.org/10.1541/ieejsmas.129.289" @default.
- W2000241838 hasPublicationYear "2009" @default.
- W2000241838 type Work @default.
- W2000241838 sameAs 2000241838 @default.
- W2000241838 citedByCount "2" @default.
- W2000241838 crossrefType "journal-article" @default.
- W2000241838 hasAuthorship W2000241838A5013323494 @default.
- W2000241838 hasAuthorship W2000241838A5033144050 @default.
- W2000241838 hasAuthorship W2000241838A5038686861 @default.
- W2000241838 hasAuthorship W2000241838A5069536133 @default.
- W2000241838 hasConcept C119599485 @default.
- W2000241838 hasConcept C120665830 @default.
- W2000241838 hasConcept C121332964 @default.
- W2000241838 hasConcept C127413603 @default.
- W2000241838 hasConcept C136525101 @default.
- W2000241838 hasConcept C142724271 @default.
- W2000241838 hasConcept C145667562 @default.
- W2000241838 hasConcept C165801399 @default.
- W2000241838 hasConcept C168834538 @default.
- W2000241838 hasConcept C17525397 @default.
- W2000241838 hasConcept C17829176 @default.
- W2000241838 hasConcept C192562407 @default.
- W2000241838 hasConcept C198394728 @default.
- W2000241838 hasConcept C204787440 @default.
- W2000241838 hasConcept C206493696 @default.
- W2000241838 hasConcept C24890656 @default.
- W2000241838 hasConcept C30066665 @default.
- W2000241838 hasConcept C37977207 @default.
- W2000241838 hasConcept C49040817 @default.
- W2000241838 hasConcept C544956773 @default.
- W2000241838 hasConcept C62520636 @default.
- W2000241838 hasConcept C6260449 @default.
- W2000241838 hasConcept C71924100 @default.
- W2000241838 hasConcept C927094 @default.
- W2000241838 hasConcept C96199931 @default.
- W2000241838 hasConcept C97126364 @default.
- W2000241838 hasConceptScore W2000241838C119599485 @default.
- W2000241838 hasConceptScore W2000241838C120665830 @default.
- W2000241838 hasConceptScore W2000241838C121332964 @default.
- W2000241838 hasConceptScore W2000241838C127413603 @default.
- W2000241838 hasConceptScore W2000241838C136525101 @default.
- W2000241838 hasConceptScore W2000241838C142724271 @default.
- W2000241838 hasConceptScore W2000241838C145667562 @default.
- W2000241838 hasConceptScore W2000241838C165801399 @default.
- W2000241838 hasConceptScore W2000241838C168834538 @default.
- W2000241838 hasConceptScore W2000241838C17525397 @default.
- W2000241838 hasConceptScore W2000241838C17829176 @default.
- W2000241838 hasConceptScore W2000241838C192562407 @default.
- W2000241838 hasConceptScore W2000241838C198394728 @default.
- W2000241838 hasConceptScore W2000241838C204787440 @default.
- W2000241838 hasConceptScore W2000241838C206493696 @default.
- W2000241838 hasConceptScore W2000241838C24890656 @default.
- W2000241838 hasConceptScore W2000241838C30066665 @default.
- W2000241838 hasConceptScore W2000241838C37977207 @default.
- W2000241838 hasConceptScore W2000241838C49040817 @default.
- W2000241838 hasConceptScore W2000241838C544956773 @default.
- W2000241838 hasConceptScore W2000241838C62520636 @default.
- W2000241838 hasConceptScore W2000241838C6260449 @default.
- W2000241838 hasConceptScore W2000241838C71924100 @default.
- W2000241838 hasConceptScore W2000241838C927094 @default.
- W2000241838 hasConceptScore W2000241838C96199931 @default.
- W2000241838 hasConceptScore W2000241838C97126364 @default.
- W2000241838 hasIssue "9" @default.
- W2000241838 hasLocation W20002418381 @default.
- W2000241838 hasOpenAccess W2000241838 @default.
- W2000241838 hasPrimaryLocation W20002418381 @default.
- W2000241838 hasRelatedWork W1850017493 @default.
- W2000241838 hasRelatedWork W1968627067 @default.
- W2000241838 hasRelatedWork W2071822903 @default.
- W2000241838 hasRelatedWork W2116769203 @default.
- W2000241838 hasRelatedWork W2133189786 @default.
- W2000241838 hasRelatedWork W2144031741 @default.
- W2000241838 hasRelatedWork W2167325032 @default.
- W2000241838 hasRelatedWork W2171747693 @default.
- W2000241838 hasRelatedWork W2359289305 @default.
- W2000241838 hasRelatedWork W4242637793 @default.
- W2000241838 hasVolume "129" @default.
- W2000241838 isParatext "false" @default.
- W2000241838 isRetracted "false" @default.
- W2000241838 magId "2000241838" @default.
- W2000241838 workType "article" @default.