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- W2000263722 abstract "This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of FBAR sensor downshifts linearly when there is IR (peak wavelength at 780nm) illumination on the device. This effect attributed to the temperature sensitivity of the FBAR. The noise equivalent temperature difference (NETD) and the detection limit for 780 nm IR of the sensor is 25 mK at 25°C and 19 μW/mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> , respectively. This study has proven the feasibility of detection of IR using ZnO film based FBAR." @default.
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- W2000263722 date "2010-01-01" @default.
- W2000263722 modified "2023-10-16" @default.
- W2000263722 title "Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor" @default.
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- W2000263722 doi "https://doi.org/10.1109/nems.2010.5592244" @default.
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