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• W2000264042 endingPage "33" @default.
• W2000264042 startingPage "26" @default.
• W2000264042 abstract "The semiconductor industry is continuously facing four main challenges in film characterization techniques: accuracy, speed, throughput and flexibility. Virtual Metrology (VM), defined as the prediction of metrology variables using process and wafer state information, is able to successfully address these four challenges. VM is understood as definition and application of predictive and corrective mathematical models to specify metrology outputs (physical measurements). These statistical models are based on metrology data and equipment parameters. The objective of this study is to develop a model predicting the CVD oxide thickness (average) for an IMD (Inter Metal Dielectric) deposition process using FDC data (Fault Detection and Classification) and metrology data. In this paper, two VM models are studied: one based on Partial Least Squares Regression (PLS) and one based on Tree ensembles. We will demonstrate that both models show good predictive strength. Finally, we will highlight that model update is key for ensuring a good model robustness over time and that an indicator of confidence of the predicted values is necessary too if the VM model has to be use on-line in a production environment." @default.
• W2000264042 created "2016-06-24" @default.
• W2000264042 creator A5004288346 @default.
• W2000264042 creator A5016031772 @default.
• W2000264042 creator A5034836839 @default.
• W2000264042 creator A5048945243 @default.
• W2000264042 creator A5050318508 @default.
• W2000264042 creator A5060547493 @default.
• W2000264042 creator A5073236255 @default.
• W2000264042 date "2012-08-31" @default.
• W2000264042 modified "2023-10-01" @default.
• W2000264042 title "Virtual Metrology Modeling for CVD Film Thickness" @default.
• W2000264042 cites W1484867920 @default.
• W2000264042 cites W1504694836 @default.
• W2000264042 cites W1506182591 @default.
• W2000264042 cites W1582290234 @default.
• W2000264042 cites W2006971615 @default.
• W2000264042 cites W2017422910 @default.
• W2000264042 cites W2060880752 @default.
• W2000264042 cites W2067885219 @default.
• W2000264042 cites W2068852101 @default.
• W2000264042 cites W2075852334 @default.
• W2000264042 cites W2099650558 @default.
• W2000264042 cites W2102380305 @default.
• W2000264042 cites W2102445355 @default.
• W2000264042 cites W2112081648 @default.
• W2000264042 cites W2115540908 @default.
• W2000264042 cites W2115571336 @default.
• W2000264042 cites W2127314075 @default.
• W2000264042 cites W2129431599 @default.
• W2000264042 cites W2132797624 @default.
• W2000264042 cites W2139430280 @default.
• W2000264042 cites W2147572077 @default.
• W2000264042 cites W2147973445 @default.
• W2000264042 cites W2163895341 @default.
• W2000264042 cites W2166774870 @default.
• W2000264042 cites W2168143294 @default.
• W2000264042 cites W2795739367 @default.
• W2000264042 doi "https://doi.org/10.5923/j.control.20120203.02" @default.
• W2000264042 hasPublicationYear "2012" @default.
• W2000264042 type Work @default.
• W2000264042 sameAs 2000264042 @default.
• W2000264042 citedByCount "24" @default.
• W2000264042 countsByYear W20002640422013 @default.
• W2000264042 countsByYear W20002640422014 @default.
• W2000264042 countsByYear W20002640422015 @default.
• W2000264042 countsByYear W20002640422016 @default.
• W2000264042 countsByYear W20002640422017 @default.
• W2000264042 countsByYear W20002640422018 @default.
• W2000264042 countsByYear W20002640422019 @default.
• W2000264042 countsByYear W20002640422020 @default.
• W2000264042 countsByYear W20002640422021 @default.
• W2000264042 countsByYear W20002640422022 @default.
• W2000264042 countsByYear W20002640422023 @default.
• W2000264042 crossrefType "journal-article" @default.
• W2000264042 hasAuthorship W2000264042A5004288346 @default.
• W2000264042 hasAuthorship W2000264042A5016031772 @default.
• W2000264042 hasAuthorship W2000264042A5034836839 @default.
• W2000264042 hasAuthorship W2000264042A5048945243 @default.
• W2000264042 hasAuthorship W2000264042A5050318508 @default.
• W2000264042 hasAuthorship W2000264042A5060547493 @default.
• W2000264042 hasAuthorship W2000264042A5073236255 @default.
• W2000264042 hasConcept C104317684 @default.
• W2000264042 hasConcept C105795698 @default.
• W2000264042 hasConcept C119857082 @default.
• W2000264042 hasConcept C124101348 @default.
• W2000264042 hasConcept C127413603 @default.
• W2000264042 hasConcept C157764524 @default.
• W2000264042 hasConcept C160671074 @default.
• W2000264042 hasConcept C171250308 @default.
• W2000264042 hasConcept C185592680 @default.
• W2000264042 hasConcept C192562407 @default.
• W2000264042 hasConcept C195766429 @default.
• W2000264042 hasConcept C200601418 @default.
• W2000264042 hasConcept C22354355 @default.
• W2000264042 hasConcept C2780598303 @default.
• W2000264042 hasConcept C33923547 @default.
• W2000264042 hasConcept C41008148 @default.
• W2000264042 hasConcept C45804977 @default.
• W2000264042 hasConcept C55493867 @default.
• W2000264042 hasConcept C555944384 @default.
• W2000264042 hasConcept C63479239 @default.
• W2000264042 hasConcept C66018809 @default.
• W2000264042 hasConcept C76155785 @default.
• W2000264042 hasConceptScore W2000264042C104317684 @default.
• W2000264042 hasConceptScore W2000264042C105795698 @default.
• W2000264042 hasConceptScore W2000264042C119857082 @default.
• W2000264042 hasConceptScore W2000264042C124101348 @default.
• W2000264042 hasConceptScore W2000264042C127413603 @default.
• W2000264042 hasConceptScore W2000264042C157764524 @default.
• W2000264042 hasConceptScore W2000264042C160671074 @default.
• W2000264042 hasConceptScore W2000264042C171250308 @default.
• W2000264042 hasConceptScore W2000264042C185592680 @default.
• W2000264042 hasConceptScore W2000264042C192562407 @default.
• W2000264042 hasConceptScore W2000264042C195766429 @default.
• W2000264042 hasConceptScore W2000264042C200601418 @default.
• W2000264042 hasConceptScore W2000264042C22354355 @default.
• W2000264042 hasConceptScore W2000264042C2780598303 @default.

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