SemOpenAlex |

SemOpenAlex

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000267719> ?p ?o ?g. }

Showing items 1 to 100 of ±109 with 100 items per page.

W2000267719 endingPage "228" @default.
W2000267719 startingPage "221" @default.
W2000267719 abstract "Step and flash imprint lithography (SFIL) replicates patterns by using a transparent template with relief images etched into its surface. Recent work has examined alternative methods for template fabrication. One scheme incorporates a conductive and transparent layer of indium tin oxide (ITO) on the surface of the substrate. Features are defined on the templates by patterning a thin layer of PECVD oxide that is deposited on the ITO layer. A second method bypasses the oxide etch process by imaging a thin layer of hydrogen silsesquioxane (HSQ). By combining or iterating the two methods, it is possible to form multi-tiered structures on a template. Two and three tier structures were fabricated on silicon wafers and templates. A two layer structure was fabricated on a quartz photoplate by patterning PECVD oxide and subsequently patterning a second tier using HSQ. The resulting relief structures were successfully replicated on wafers using SFIL." @default.
W2000267719 created "2016-06-24" @default.
W2000267719 creator A5004012415 @default.
W2000267719 creator A5007588124 @default.
W2000267719 creator A5011245653 @default.
W2000267719 creator A5015405401 @default.
W2000267719 creator A5023291759 @default.
W2000267719 creator A5027381116 @default.
W2000267719 creator A5031167376 @default.
W2000267719 creator A5037826838 @default.
W2000267719 creator A5043145637 @default.
W2000267719 creator A5044551981 @default.
W2000267719 creator A5063211619 @default.
W2000267719 creator A5071426093 @default.
W2000267719 creator A5087182390 @default.
W2000267719 date "2003-06-01" @default.
W2000267719 modified "2023-10-11" @default.
W2000267719 title "Fabrication of multi-tiered structures on step and flash imprint lithography templates" @default.
W2000267719 cites W1973312921 @default.
W2000267719 cites W1993402801 @default.
W2000267719 cites W2023937341 @default.
W2000267719 cites W2037465028 @default.
W2000267719 cites W2084355221 @default.
W2000267719 cites W2115669216 @default.
W2000267719 cites W2135449523 @default.
W2000267719 cites W2138368127 @default.
W2000267719 cites W2177896570 @default.
W2000267719 doi "https://doi.org/10.1016/s0167-9317(03)00075-3" @default.
W2000267719 hasPublicationYear "2003" @default.
W2000267719 type Work @default.
W2000267719 sameAs 2000267719 @default.
W2000267719 citedByCount "24" @default.
W2000267719 countsByYear W20002677192012 @default.
W2000267719 countsByYear W20002677192013 @default.
W2000267719 countsByYear W20002677192017 @default.
W2000267719 crossrefType "journal-article" @default.
W2000267719 hasAuthorship W2000267719A5004012415 @default.
W2000267719 hasAuthorship W2000267719A5007588124 @default.
W2000267719 hasAuthorship W2000267719A5011245653 @default.
W2000267719 hasAuthorship W2000267719A5015405401 @default.
W2000267719 hasAuthorship W2000267719A5023291759 @default.
W2000267719 hasAuthorship W2000267719A5027381116 @default.
W2000267719 hasAuthorship W2000267719A5031167376 @default.
W2000267719 hasAuthorship W2000267719A5037826838 @default.
W2000267719 hasAuthorship W2000267719A5043145637 @default.
W2000267719 hasAuthorship W2000267719A5044551981 @default.
W2000267719 hasAuthorship W2000267719A5063211619 @default.
W2000267719 hasAuthorship W2000267719A5071426093 @default.
W2000267719 hasAuthorship W2000267719A5087182390 @default.
W2000267719 hasConcept C100460472 @default.
W2000267719 hasConcept C111368507 @default.
W2000267719 hasConcept C127313418 @default.
W2000267719 hasConcept C136525101 @default.
W2000267719 hasConcept C142724271 @default.
W2000267719 hasConcept C160671074 @default.
W2000267719 hasConcept C171250308 @default.
W2000267719 hasConcept C180088628 @default.
W2000267719 hasConcept C192562407 @default.
W2000267719 hasConcept C200274948 @default.
W2000267719 hasConcept C204223013 @default.
W2000267719 hasConcept C204787440 @default.
W2000267719 hasConcept C2777289219 @default.
W2000267719 hasConcept C2778339742 @default.
W2000267719 hasConcept C2779227376 @default.
W2000267719 hasConcept C32737372 @default.
W2000267719 hasConcept C49040817 @default.
W2000267719 hasConcept C53524968 @default.
W2000267719 hasConcept C71924100 @default.
W2000267719 hasConcept C82714645 @default.
W2000267719 hasConceptScore W2000267719C100460472 @default.
W2000267719 hasConceptScore W2000267719C111368507 @default.
W2000267719 hasConceptScore W2000267719C127313418 @default.
W2000267719 hasConceptScore W2000267719C136525101 @default.
W2000267719 hasConceptScore W2000267719C142724271 @default.
W2000267719 hasConceptScore W2000267719C160671074 @default.
W2000267719 hasConceptScore W2000267719C171250308 @default.
W2000267719 hasConceptScore W2000267719C180088628 @default.
W2000267719 hasConceptScore W2000267719C192562407 @default.
W2000267719 hasConceptScore W2000267719C200274948 @default.
W2000267719 hasConceptScore W2000267719C204223013 @default.
W2000267719 hasConceptScore W2000267719C204787440 @default.
W2000267719 hasConceptScore W2000267719C2777289219 @default.
W2000267719 hasConceptScore W2000267719C2778339742 @default.
W2000267719 hasConceptScore W2000267719C2779227376 @default.
W2000267719 hasConceptScore W2000267719C32737372 @default.
W2000267719 hasConceptScore W2000267719C49040817 @default.
W2000267719 hasConceptScore W2000267719C53524968 @default.
W2000267719 hasConceptScore W2000267719C71924100 @default.
W2000267719 hasConceptScore W2000267719C82714645 @default.
W2000267719 hasLocation W20002677191 @default.
W2000267719 hasOpenAccess W2000267719 @default.
W2000267719 hasPrimaryLocation W20002677191 @default.
W2000267719 hasRelatedWork W1981126549 @default.
W2000267719 hasRelatedWork W1994137250 @default.
W2000267719 hasRelatedWork W2016181546 @default.
W2000267719 hasRelatedWork W2026197969 @default.
W2000267719 hasRelatedWork W2040222271 @default.
W2000267719 hasRelatedWork W2083481954 @default.