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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000291804> ?p ?o ?g. }

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• W2000291804 abstract "A displacement measurement technology of diffractive interferometry has been developed in the objective of miniaturization. The interference principle has been implemented in the form of a miniature read head prototype according to a novel device configuration after a discussion on the fabrication and mouting tolerances has been made conducting to a high resolution micro-optical encoder. A read-out grating acting simultaneously as a subwavelength and a two order grating enables the miniaturization of a diffractive interferometric optical displacement sensor of the reflection type." @default.
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• W2000291804 date "2002-01-01" @default.
• W2000291804 modified "2023-09-30" @default.
• W2000291804 title "Compact diffractive interferometric displacement sensor in reflection" @default.
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• W2000291804 doi "https://doi.org/10.1016/s0141-6359(01)00081-2" @default.
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