Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000303458> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2000303458 abstract "Poly(4-hydroxystyrene) (PHS), a backbone polymer in resist constituents is also a promising material for extreme ultraviolet (EUV) and electron beam (EB) lithography. Efficient deprotonation occurs from radical cations of irradiated PHS. A hydroxystyrene unit is incorporated in the chemically amplified resist structure as a proton source, in which reaction mechanism has not been well established. In this study, deprotonation mechanism of an ionized PHS was characterized by using pulse radiolysis techniques. The influence of several additives such as sulfoxides and amides with high acidity on the kinetics of the deprotonation was investigated to clarify the fundamentals of the enhancement of deprotonation efficiency from the PHS radical cation. Influence of the additives on the acid yield in thin film was also investigated." @default.
- W2000303458 created "2016-06-24" @default.
- W2000303458 creator A5014467621 @default.
- W2000303458 creator A5037346718 @default.
- W2000303458 creator A5050045974 @default.
- W2000303458 creator A5055649505 @default.
- W2000303458 creator A5057164315 @default.
- W2000303458 creator A5074386879 @default.
- W2000303458 creator A5089058595 @default.
- W2000303458 date "2014-03-27" @default.
- W2000303458 modified "2023-09-23" @default.
- W2000303458 title "Deprotonation mechanism of ionized poly(4-hydroxystyrene)" @default.
- W2000303458 cites W1983550027 @default.
- W2000303458 cites W1986342702 @default.
- W2000303458 cites W1998510743 @default.
- W2000303458 cites W2000443839 @default.
- W2000303458 cites W2011427720 @default.
- W2000303458 cites W2014122027 @default.
- W2000303458 cites W2014526665 @default.
- W2000303458 cites W2020324991 @default.
- W2000303458 cites W2027253590 @default.
- W2000303458 cites W2056591540 @default.
- W2000303458 cites W4253936586 @default.
- W2000303458 cites W646816100 @default.
- W2000303458 doi "https://doi.org/10.1117/12.2045881" @default.
- W2000303458 hasPublicationYear "2014" @default.
- W2000303458 type Work @default.
- W2000303458 sameAs 2000303458 @default.
- W2000303458 citedByCount "1" @default.
- W2000303458 countsByYear W20003034582017 @default.
- W2000303458 crossrefType "proceedings-article" @default.
- W2000303458 hasAuthorship W2000303458A5014467621 @default.
- W2000303458 hasAuthorship W2000303458A5037346718 @default.
- W2000303458 hasAuthorship W2000303458A5050045974 @default.
- W2000303458 hasAuthorship W2000303458A5055649505 @default.
- W2000303458 hasAuthorship W2000303458A5057164315 @default.
- W2000303458 hasAuthorship W2000303458A5074386879 @default.
- W2000303458 hasAuthorship W2000303458A5089058595 @default.
- W2000303458 hasConcept C118629725 @default.
- W2000303458 hasConcept C120665830 @default.
- W2000303458 hasConcept C121332964 @default.
- W2000303458 hasConcept C139066938 @default.
- W2000303458 hasConcept C145148216 @default.
- W2000303458 hasConcept C146024833 @default.
- W2000303458 hasConcept C162996421 @default.
- W2000303458 hasConcept C171250308 @default.
- W2000303458 hasConcept C178790620 @default.
- W2000303458 hasConcept C185592680 @default.
- W2000303458 hasConcept C192562407 @default.
- W2000303458 hasConcept C198291218 @default.
- W2000303458 hasConcept C520434653 @default.
- W2000303458 hasConcept C54516573 @default.
- W2000303458 hasConcept C62520636 @default.
- W2000303458 hasConcept C66887884 @default.
- W2000303458 hasConcept C75473681 @default.
- W2000303458 hasConceptScore W2000303458C118629725 @default.
- W2000303458 hasConceptScore W2000303458C120665830 @default.
- W2000303458 hasConceptScore W2000303458C121332964 @default.
- W2000303458 hasConceptScore W2000303458C139066938 @default.
- W2000303458 hasConceptScore W2000303458C145148216 @default.
- W2000303458 hasConceptScore W2000303458C146024833 @default.
- W2000303458 hasConceptScore W2000303458C162996421 @default.
- W2000303458 hasConceptScore W2000303458C171250308 @default.
- W2000303458 hasConceptScore W2000303458C178790620 @default.
- W2000303458 hasConceptScore W2000303458C185592680 @default.
- W2000303458 hasConceptScore W2000303458C192562407 @default.
- W2000303458 hasConceptScore W2000303458C198291218 @default.
- W2000303458 hasConceptScore W2000303458C520434653 @default.
- W2000303458 hasConceptScore W2000303458C54516573 @default.
- W2000303458 hasConceptScore W2000303458C62520636 @default.
- W2000303458 hasConceptScore W2000303458C66887884 @default.
- W2000303458 hasConceptScore W2000303458C75473681 @default.
- W2000303458 hasLocation W20003034581 @default.
- W2000303458 hasOpenAccess W2000303458 @default.
- W2000303458 hasPrimaryLocation W20003034581 @default.
- W2000303458 hasRelatedWork W1538585021 @default.
- W2000303458 hasRelatedWork W1636914096 @default.
- W2000303458 hasRelatedWork W1987038629 @default.
- W2000303458 hasRelatedWork W2014526665 @default.
- W2000303458 hasRelatedWork W2030397731 @default.
- W2000303458 hasRelatedWork W2046304326 @default.
- W2000303458 hasRelatedWork W2052002294 @default.
- W2000303458 hasRelatedWork W2054933743 @default.
- W2000303458 hasRelatedWork W3180171841 @default.
- W2000303458 hasRelatedWork W4230180980 @default.
- W2000303458 isParatext "false" @default.
- W2000303458 isRetracted "false" @default.
- W2000303458 magId "2000303458" @default.
- W2000303458 workType "article" @default.