FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000304641> ?p ?o ?g. }

• W2000304641 endingPage "290" @default.
• W2000304641 startingPage "282" @default.
• W2000304641 abstract "Recombination coefficients (γ) of Br and F atoms have been measured for crystalline Si, quartz, photoresist, anodized aluminum, poly-Si, WSix, tungsten and stainless steel surfaces for a range of temperatures. The γBr and γF values are compared to our previously reported measurements of γCl [G. P. Kota, J. W. Coburn, and D. B. Graves, J. Vac. Sci. Technol. A 16, 270 (1998)]. In general, the Br-, Cl- and F-atom recombination coefficients decrease as the surface temperature increases. The γBr values are similar to the γCl values for the various surfaces. At room temperature, γBr is highest (&gt;0.4) for stainless steel and tungsten, moderate (0.1–0.4) for poly-Si, WSix and anodized Al, and lowest (&lt;0.05) for c-Si, quartz and photoresist. However, γF, at room temperature, is no greater than 0.05 for all the surfaces. γF increases slightly as the temperature is decreased to 80 K but is still below 0.1 for all the surfaces. The recombination coefficient data as a function of temperature for all surfaces are fit to a phenomenological model developed previously for γCl (see the above reference). The model assumes that the incident halogen atoms physisorb on a surface that is saturated with chemisorbed halogen atoms. The physisorbed atoms are assumed to diffuse on the surface and either desorb before recombining or recombine and then desorb. The recombination rate is assumed to be first order in physisorbed atom coverage." @default.
• W2000304641 created "2016-06-24" @default.
• W2000304641 creator A5029456003 @default.
• W2000304641 creator A5047850382 @default.
• W2000304641 creator A5077850920 @default.
• W2000304641 date "1999-01-01" @default.
• W2000304641 modified "2023-09-24" @default.
• W2000304641 title "Heterogeneous recombination of atomic bromine and fluorine" @default.
• W2000304641 cites W1966771346 @default.
• W2000304641 cites W1973237866 @default.
• W2000304641 cites W1973685322 @default.
• W2000304641 cites W1975482305 @default.
• W2000304641 cites W1976268392 @default.
• W2000304641 cites W1978721114 @default.
• W2000304641 cites W1979415266 @default.
• W2000304641 cites W1985971972 @default.
• W2000304641 cites W1987119409 @default.
• W2000304641 cites W1987417358 @default.
• W2000304641 cites W1992486971 @default.
• W2000304641 cites W1995380951 @default.
• W2000304641 cites W2002676026 @default.
• W2000304641 cites W2003086875 @default.
• W2000304641 cites W2011064812 @default.
• W2000304641 cites W2013543599 @default.
• W2000304641 cites W2018902022 @default.
• W2000304641 cites W2021748168 @default.
• W2000304641 cites W2026519374 @default.
• W2000304641 cites W2032324354 @default.
• W2000304641 cites W2042936325 @default.
• W2000304641 cites W2056050148 @default.
• W2000304641 cites W2065608656 @default.
• W2000304641 cites W2089200430 @default.
• W2000304641 cites W2125501758 @default.
• W2000304641 cites W2161803715 @default.
• W2000304641 cites W2218842098 @default.
• W2000304641 cites W2503738668 @default.
• W2000304641 doi "https://doi.org/10.1116/1.581582" @default.
• W2000304641 hasPublicationYear "1999" @default.
• W2000304641 type Work @default.
• W2000304641 sameAs 2000304641 @default.
• W2000304641 citedByCount "75" @default.
• W2000304641 countsByYear W20003046412013 @default.
• W2000304641 countsByYear W20003046412014 @default.
• W2000304641 countsByYear W20003046412017 @default.
• W2000304641 countsByYear W20003046412018 @default.
• W2000304641 countsByYear W20003046412019 @default.
• W2000304641 countsByYear W20003046412021 @default.
• W2000304641 countsByYear W20003046412022 @default.
• W2000304641 countsByYear W20003046412023 @default.
• W2000304641 crossrefType "journal-article" @default.
• W2000304641 hasAuthorship W2000304641A5029456003 @default.
• W2000304641 hasAuthorship W2000304641A5047850382 @default.
• W2000304641 hasAuthorship W2000304641A5077850920 @default.
• W2000304641 hasConcept C104317684 @default.
• W2000304641 hasConcept C113196181 @default.
• W2000304641 hasConcept C115235246 @default.
• W2000304641 hasConcept C121332964 @default.
• W2000304641 hasConcept C147789679 @default.
• W2000304641 hasConcept C149635348 @default.
• W2000304641 hasConcept C150394285 @default.
• W2000304641 hasConcept C156695909 @default.
• W2000304641 hasConcept C162711632 @default.
• W2000304641 hasConcept C178790620 @default.
• W2000304641 hasConcept C184779094 @default.
• W2000304641 hasConcept C185592680 @default.
• W2000304641 hasConcept C191897082 @default.
• W2000304641 hasConcept C192562407 @default.
• W2000304641 hasConcept C22016385 @default.
• W2000304641 hasConcept C2780263894 @default.
• W2000304641 hasConcept C39353612 @default.
• W2000304641 hasConcept C41008148 @default.
• W2000304641 hasConcept C43617362 @default.
• W2000304641 hasConcept C46062151 @default.
• W2000304641 hasConcept C506198293 @default.
• W2000304641 hasConcept C513153333 @default.
• W2000304641 hasConcept C517835270 @default.
• W2000304641 hasConcept C542268612 @default.
• W2000304641 hasConcept C544153396 @default.
• W2000304641 hasConcept C55493867 @default.
• W2000304641 hasConcept C58312451 @default.
• W2000304641 hasConcept C97355855 @default.
• W2000304641 hasConceptScore W2000304641C104317684 @default.
• W2000304641 hasConceptScore W2000304641C113196181 @default.
• W2000304641 hasConceptScore W2000304641C115235246 @default.
• W2000304641 hasConceptScore W2000304641C121332964 @default.
• W2000304641 hasConceptScore W2000304641C147789679 @default.
• W2000304641 hasConceptScore W2000304641C149635348 @default.
• W2000304641 hasConceptScore W2000304641C150394285 @default.
• W2000304641 hasConceptScore W2000304641C156695909 @default.
• W2000304641 hasConceptScore W2000304641C162711632 @default.
• W2000304641 hasConceptScore W2000304641C178790620 @default.
• W2000304641 hasConceptScore W2000304641C184779094 @default.
• W2000304641 hasConceptScore W2000304641C185592680 @default.
• W2000304641 hasConceptScore W2000304641C191897082 @default.
• W2000304641 hasConceptScore W2000304641C192562407 @default.
• W2000304641 hasConceptScore W2000304641C22016385 @default.
• W2000304641 hasConceptScore W2000304641C2780263894 @default.
• W2000304641 hasConceptScore W2000304641C39353612 @default.

• next