Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000306023> ?p ?o ?g. }
- W2000306023 endingPage "G20" @default.
- W2000306023 startingPage "G20" @default.
- W2000306023 abstract "The O2 plasma pretreatment was investigated for passivation for HfO2 high-k Ge metal-oxide-semiconductor devices. With proper in situ O2 plasma passivation, the capacitance–voltage hysteresis was substantially reduced from ∼900 to ∼50 mV for the HfO2/Ge gate stacks. Capacitors show well-behaved capacitance–voltage characteristics on both p- and n-type Ge substrates, indicating an efficient electrical passivation of the Ge interface. The interface trap density for both types of Ge substrates after passivation is below 4 × 1011 eV−1cm−2. A leakage current density of 1.5 × 10−7 and 2.1 × 10−8 A/cm2 was obtained for the HfO2/p-Ge and HfO2/n-Ge capacitor with equivalent oxide thickness of 1.8 nm at VFB ± 1 V, respectively." @default.
- W2000306023 created "2016-06-24" @default.
- W2000306023 creator A5020571434 @default.
- W2000306023 creator A5026269253 @default.
- W2000306023 creator A5037463600 @default.
- W2000306023 creator A5039168166 @default.
- W2000306023 creator A5042077601 @default.
- W2000306023 creator A5050889627 @default.
- W2000306023 creator A5091551652 @default.
- W2000306023 date "2011-01-01" @default.
- W2000306023 modified "2023-09-30" @default.
- W2000306023 title "Effective Electrical Passivation of Ge(100) for HfO2 Gate Dielectric Layers Using O2 Plasma" @default.
- W2000306023 cites W1559703178 @default.
- W2000306023 cites W1570109017 @default.
- W2000306023 cites W1579234055 @default.
- W2000306023 cites W1630095108 @default.
- W2000306023 cites W1974105848 @default.
- W2000306023 cites W1984466475 @default.
- W2000306023 cites W1987287595 @default.
- W2000306023 cites W1990713771 @default.
- W2000306023 cites W2000367370 @default.
- W2000306023 cites W2003435840 @default.
- W2000306023 cites W2003645630 @default.
- W2000306023 cites W2007619360 @default.
- W2000306023 cites W2019196198 @default.
- W2000306023 cites W2042002599 @default.
- W2000306023 cites W2043928798 @default.
- W2000306023 cites W2046109959 @default.
- W2000306023 cites W2081084976 @default.
- W2000306023 cites W2084781678 @default.
- W2000306023 cites W2086264552 @default.
- W2000306023 cites W2096353337 @default.
- W2000306023 cites W2104735003 @default.
- W2000306023 cites W2112659143 @default.
- W2000306023 cites W2128922719 @default.
- W2000306023 cites W2148961769 @default.
- W2000306023 doi "https://doi.org/10.1149/1.3551461" @default.
- W2000306023 hasPublicationYear "2011" @default.
- W2000306023 type Work @default.
- W2000306023 sameAs 2000306023 @default.
- W2000306023 citedByCount "19" @default.
- W2000306023 countsByYear W20003060232012 @default.
- W2000306023 countsByYear W20003060232014 @default.
- W2000306023 countsByYear W20003060232015 @default.
- W2000306023 countsByYear W20003060232016 @default.
- W2000306023 countsByYear W20003060232017 @default.
- W2000306023 countsByYear W20003060232019 @default.
- W2000306023 countsByYear W20003060232020 @default.
- W2000306023 countsByYear W20003060232022 @default.
- W2000306023 crossrefType "journal-article" @default.
- W2000306023 hasAuthorship W2000306023A5020571434 @default.
- W2000306023 hasAuthorship W2000306023A5026269253 @default.
- W2000306023 hasAuthorship W2000306023A5037463600 @default.
- W2000306023 hasAuthorship W2000306023A5039168166 @default.
- W2000306023 hasAuthorship W2000306023A5042077601 @default.
- W2000306023 hasAuthorship W2000306023A5050889627 @default.
- W2000306023 hasAuthorship W2000306023A5091551652 @default.
- W2000306023 hasBestOaLocation W20003060232 @default.
- W2000306023 hasConcept C113196181 @default.
- W2000306023 hasConcept C119599485 @default.
- W2000306023 hasConcept C121332964 @default.
- W2000306023 hasConcept C123299182 @default.
- W2000306023 hasConcept C127413603 @default.
- W2000306023 hasConcept C133386390 @default.
- W2000306023 hasConcept C147789679 @default.
- W2000306023 hasConcept C165801399 @default.
- W2000306023 hasConcept C166972891 @default.
- W2000306023 hasConcept C171250308 @default.
- W2000306023 hasConcept C172385210 @default.
- W2000306023 hasConcept C17525397 @default.
- W2000306023 hasConcept C185592680 @default.
- W2000306023 hasConcept C191897082 @default.
- W2000306023 hasConcept C192562407 @default.
- W2000306023 hasConcept C26873012 @default.
- W2000306023 hasConcept C2779227376 @default.
- W2000306023 hasConcept C2779851234 @default.
- W2000306023 hasConcept C30066665 @default.
- W2000306023 hasConcept C33574316 @default.
- W2000306023 hasConcept C43617362 @default.
- W2000306023 hasConcept C49040817 @default.
- W2000306023 hasConcept C52192207 @default.
- W2000306023 hasConcept C544956773 @default.
- W2000306023 hasConcept C550623735 @default.
- W2000306023 hasConcept C62520636 @default.
- W2000306023 hasConcept C82706917 @default.
- W2000306023 hasConceptScore W2000306023C113196181 @default.
- W2000306023 hasConceptScore W2000306023C119599485 @default.
- W2000306023 hasConceptScore W2000306023C121332964 @default.
- W2000306023 hasConceptScore W2000306023C123299182 @default.
- W2000306023 hasConceptScore W2000306023C127413603 @default.
- W2000306023 hasConceptScore W2000306023C133386390 @default.
- W2000306023 hasConceptScore W2000306023C147789679 @default.
- W2000306023 hasConceptScore W2000306023C165801399 @default.
- W2000306023 hasConceptScore W2000306023C166972891 @default.
- W2000306023 hasConceptScore W2000306023C171250308 @default.
- W2000306023 hasConceptScore W2000306023C172385210 @default.
- W2000306023 hasConceptScore W2000306023C17525397 @default.
- W2000306023 hasConceptScore W2000306023C185592680 @default.