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- W2000336578 abstract "The drive toward advanced technology nodes has drastically increased the computational complexity of optical proximity correction (OPC). Applying full-chip OPC to all critical layers has become the most computational demanding step in the tape-out process. Tuning for fast and accurate OPC recipes is a critical step in the development of a total manufacturing solution. OPC is by design an iterative cycle, where one iteration is a single simulation and polygon fragmentation shift sequence. Typically an accurate OPC recipe requires eight or more iterations to converge to a final best solution. The number of iterations in a recipe directly impacts the full-chip OPC runtime. Engineers often find themselves spending hours tuning an OPC recipe to reduce just one iteration. This paper presents a generic technique called Fast Forward OPC (FFOPC). FFOPC will help to reduce any golden OPC recipe that meets certain requirements to a fixed 4 iterations with minimum accuracy lost. Most importantly this technique can be easily implemented as a plugin with any existing OPC tools." @default.
- W2000336578 created "2016-06-24" @default.
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- W2000336578 date "2007-10-05" @default.
- W2000336578 modified "2023-09-23" @default.
- W2000336578 title "A generic technique for reducing OPC iteration: fast forward OPC" @default.
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- W2000336578 doi "https://doi.org/10.1117/12.746757" @default.
- W2000336578 hasPublicationYear "2007" @default.
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