Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000354489> ?p ?o ?g. }
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- W2000354489 endingPage "234" @default.
- W2000354489 startingPage "227" @default.
- W2000354489 abstract "Abstract After an explanation of the set-up of a nanomeasuring machine NMM-1, its high performance is described with a metrological analysis. This analysis shows some of today´s limits of nanopositioning and nanomeasuring engineering. Single, double and triple beam plane mirror interferometers are applied in the nanomeasuring machine in order to measure and control the six degrees of freedom of the 3D nanopositioning stage. The various applications of the nanomeasuring machine are based on the installation of optical and tactile nanoprobes above the 3D nanopositioning stage. The set-up, function and measurement results of some zero-point nanoprobes in combination with the nanomeasuring machine are explained." @default.
- W2000354489 created "2016-06-24" @default.
- W2000354489 creator A5030409039 @default.
- W2000354489 creator A5048668300 @default.
- W2000354489 creator A5063046505 @default.
- W2000354489 creator A5086355320 @default.
- W2000354489 date "2009-05-01" @default.
- W2000354489 modified "2023-10-14" @default.
- W2000354489 title "The Metrological Basis and Operation of Nanopositioning and Nanomeasuring Machine NMM-1Metrologische Grundlagen und Wirkungsweise der Nanopositionier- und Messmaschine NMM-1" @default.
- W2000354489 cites W1991499667 @default.
- W2000354489 cites W2055366849 @default.
- W2000354489 cites W4213151480 @default.
- W2000354489 doi "https://doi.org/10.1524/teme.2009.0960" @default.
- W2000354489 hasPublicationYear "2009" @default.
- W2000354489 type Work @default.
- W2000354489 sameAs 2000354489 @default.
- W2000354489 citedByCount "40" @default.
- W2000354489 countsByYear W20003544892012 @default.
- W2000354489 countsByYear W20003544892013 @default.
- W2000354489 countsByYear W20003544892014 @default.
- W2000354489 countsByYear W20003544892015 @default.
- W2000354489 countsByYear W20003544892016 @default.
- W2000354489 countsByYear W20003544892019 @default.
- W2000354489 countsByYear W20003544892020 @default.
- W2000354489 countsByYear W20003544892021 @default.
- W2000354489 countsByYear W20003544892022 @default.
- W2000354489 countsByYear W20003544892023 @default.
- W2000354489 crossrefType "journal-article" @default.
- W2000354489 hasAuthorship W2000354489A5030409039 @default.
- W2000354489 hasAuthorship W2000354489A5048668300 @default.
- W2000354489 hasAuthorship W2000354489A5063046505 @default.
- W2000354489 hasAuthorship W2000354489A5086355320 @default.
- W2000354489 hasConcept C120665830 @default.
- W2000354489 hasConcept C121332964 @default.
- W2000354489 hasConcept C127413603 @default.
- W2000354489 hasConcept C166689943 @default.
- W2000354489 hasConcept C177264268 @default.
- W2000354489 hasConcept C195766429 @default.
- W2000354489 hasConcept C199360897 @default.
- W2000354489 hasConcept C199639397 @default.
- W2000354489 hasConcept C2780009758 @default.
- W2000354489 hasConcept C41008148 @default.
- W2000354489 hasConcept C77088390 @default.
- W2000354489 hasConcept C78519656 @default.
- W2000354489 hasConceptScore W2000354489C120665830 @default.
- W2000354489 hasConceptScore W2000354489C121332964 @default.
- W2000354489 hasConceptScore W2000354489C127413603 @default.
- W2000354489 hasConceptScore W2000354489C166689943 @default.
- W2000354489 hasConceptScore W2000354489C177264268 @default.
- W2000354489 hasConceptScore W2000354489C195766429 @default.
- W2000354489 hasConceptScore W2000354489C199360897 @default.
- W2000354489 hasConceptScore W2000354489C199639397 @default.
- W2000354489 hasConceptScore W2000354489C2780009758 @default.
- W2000354489 hasConceptScore W2000354489C41008148 @default.
- W2000354489 hasConceptScore W2000354489C77088390 @default.
- W2000354489 hasConceptScore W2000354489C78519656 @default.
- W2000354489 hasIssue "5" @default.
- W2000354489 hasLocation W20003544891 @default.
- W2000354489 hasOpenAccess W2000354489 @default.
- W2000354489 hasPrimaryLocation W20003544891 @default.
- W2000354489 hasRelatedWork W1966176431 @default.
- W2000354489 hasRelatedWork W1974665061 @default.
- W2000354489 hasRelatedWork W2001195527 @default.
- W2000354489 hasRelatedWork W2001966778 @default.
- W2000354489 hasRelatedWork W2033686348 @default.
- W2000354489 hasRelatedWork W2060621643 @default.
- W2000354489 hasRelatedWork W2151080099 @default.
- W2000354489 hasRelatedWork W2326273876 @default.
- W2000354489 hasRelatedWork W2333321165 @default.
- W2000354489 hasRelatedWork W2793377474 @default.
- W2000354489 hasVolume "76" @default.
- W2000354489 isParatext "false" @default.
- W2000354489 isRetracted "false" @default.
- W2000354489 magId "2000354489" @default.
- W2000354489 workType "article" @default.