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- W2000358180 abstract "As the industry moves toward 45nm technology node and beyond, further reduction of lithographic process window is anticipated. The consequence of this is twofold: first, the manufactured chip will have pattern sizes that are different from the designed pattern sizes and those variations may become more dominated by systematic components as the process windows shrink; second, smaller process windows will lead to yield loss as, at small dimensions, lithographic process windows are often constrained by catastrophic fails such as resist collapse or trench scumming, rather than by gradual pattern size variation. With this notion, Optical Proximity Correction (OPC) for future technology generations must evolve from the current single process point OPC to algorithms that provide an OPC solution optimized for process variability and yield. In this paper, a Process Window OPC (PWOPC) concept is discussed, along with its place in the design-to-manufacturing flow. Use of additional models for process corners, integration of process fails and algorithm optimization for a production-worthy flow are described. Results are presented for 65nm metal levels." @default.
- W2000358180 created "2016-06-24" @default.
- W2000358180 creator A5001468082 @default.
- W2000358180 creator A5020632713 @default.
- W2000358180 creator A5069901977 @default.
- W2000358180 creator A5079439785 @default.
- W2000358180 creator A5082819456 @default.
- W2000358180 creator A5087265270 @default.
- W2000358180 date "2006-03-10" @default.
- W2000358180 modified "2023-09-26" @default.
- W2000358180 title "Process window OPC for reduced process variability and enhanced yield" @default.
- W2000358180 doi "https://doi.org/10.1117/12.656835" @default.
- W2000358180 hasPublicationYear "2006" @default.
- W2000358180 type Work @default.
- W2000358180 sameAs 2000358180 @default.
- W2000358180 citedByCount "26" @default.
- W2000358180 countsByYear W20003581802012 @default.
- W2000358180 countsByYear W20003581802013 @default.
- W2000358180 countsByYear W20003581802014 @default.
- W2000358180 countsByYear W20003581802016 @default.
- W2000358180 countsByYear W20003581802017 @default.
- W2000358180 countsByYear W20003581802018 @default.
- W2000358180 crossrefType "proceedings-article" @default.
- W2000358180 hasAuthorship W2000358180A5001468082 @default.
- W2000358180 hasAuthorship W2000358180A5020632713 @default.
- W2000358180 hasAuthorship W2000358180A5069901977 @default.
- W2000358180 hasAuthorship W2000358180A5079439785 @default.
- W2000358180 hasAuthorship W2000358180A5082819456 @default.
- W2000358180 hasAuthorship W2000358180A5087265270 @default.
- W2000358180 hasConcept C105487726 @default.
- W2000358180 hasConcept C111335779 @default.
- W2000358180 hasConcept C111919701 @default.
- W2000358180 hasConcept C127413603 @default.
- W2000358180 hasConcept C155310634 @default.
- W2000358180 hasConcept C165005293 @default.
- W2000358180 hasConcept C171250308 @default.
- W2000358180 hasConcept C192562407 @default.
- W2000358180 hasConcept C204223013 @default.
- W2000358180 hasConcept C2524010 @default.
- W2000358180 hasConcept C2777441419 @default.
- W2000358180 hasConcept C2779227376 @default.
- W2000358180 hasConcept C33923547 @default.
- W2000358180 hasConcept C41008148 @default.
- W2000358180 hasConcept C49040817 @default.
- W2000358180 hasConcept C53524968 @default.
- W2000358180 hasConcept C62611344 @default.
- W2000358180 hasConcept C66938386 @default.
- W2000358180 hasConcept C76155785 @default.
- W2000358180 hasConcept C78371743 @default.
- W2000358180 hasConcept C93389723 @default.
- W2000358180 hasConcept C98045186 @default.
- W2000358180 hasConceptScore W2000358180C105487726 @default.
- W2000358180 hasConceptScore W2000358180C111335779 @default.
- W2000358180 hasConceptScore W2000358180C111919701 @default.
- W2000358180 hasConceptScore W2000358180C127413603 @default.
- W2000358180 hasConceptScore W2000358180C155310634 @default.
- W2000358180 hasConceptScore W2000358180C165005293 @default.
- W2000358180 hasConceptScore W2000358180C171250308 @default.
- W2000358180 hasConceptScore W2000358180C192562407 @default.
- W2000358180 hasConceptScore W2000358180C204223013 @default.
- W2000358180 hasConceptScore W2000358180C2524010 @default.
- W2000358180 hasConceptScore W2000358180C2777441419 @default.
- W2000358180 hasConceptScore W2000358180C2779227376 @default.
- W2000358180 hasConceptScore W2000358180C33923547 @default.
- W2000358180 hasConceptScore W2000358180C41008148 @default.
- W2000358180 hasConceptScore W2000358180C49040817 @default.
- W2000358180 hasConceptScore W2000358180C53524968 @default.
- W2000358180 hasConceptScore W2000358180C62611344 @default.
- W2000358180 hasConceptScore W2000358180C66938386 @default.
- W2000358180 hasConceptScore W2000358180C76155785 @default.
- W2000358180 hasConceptScore W2000358180C78371743 @default.
- W2000358180 hasConceptScore W2000358180C93389723 @default.
- W2000358180 hasConceptScore W2000358180C98045186 @default.
- W2000358180 hasLocation W20003581801 @default.
- W2000358180 hasOpenAccess W2000358180 @default.
- W2000358180 hasPrimaryLocation W20003581801 @default.
- W2000358180 hasRelatedWork W1973336329 @default.
- W2000358180 hasRelatedWork W1997758026 @default.
- W2000358180 hasRelatedWork W2000358180 @default.
- W2000358180 hasRelatedWork W2029285512 @default.
- W2000358180 hasRelatedWork W2062450130 @default.
- W2000358180 hasRelatedWork W2069004321 @default.
- W2000358180 hasRelatedWork W2077522956 @default.
- W2000358180 hasRelatedWork W2078493491 @default.
- W2000358180 hasRelatedWork W2120442423 @default.
- W2000358180 hasRelatedWork W2083198784 @default.
- W2000358180 isParatext "false" @default.
- W2000358180 isRetracted "false" @default.
- W2000358180 magId "2000358180" @default.
- W2000358180 workType "article" @default.