Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000360920> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W2000360920 abstract "The focus of this study is on the fabrication of through silicon vias (TSV) for three dimensional packaging. According to IPC-6016, the definition of microvias is a hole with a diameter of less than or equal to 150 μm. In order to meet this requirement, laser drilling and deep reactive ion etching (but not wet etching) are used to make the microvias. Comparisons between these two different methods are carried out in terms of wall straightness, smoothness, smallest via produced and time needed for fabrication. In addition, discussion on wafer thinning for making through silicon microvias is given as well." @default.
- W2000360920 created "2016-06-24" @default.
- W2000360920 creator A5012364219 @default.
- W2000360920 creator A5061913080 @default.
- W2000360920 creator A5075457874 @default.
- W2000360920 date "2004-01-01" @default.
- W2000360920 modified "2023-10-18" @default.
- W2000360920 title "Formation of Through-Silicon-Vias by Laser Drilling and Deep Reactive Ion Etching" @default.
- W2000360920 doi "https://doi.org/10.1115/imece2004-62322" @default.
- W2000360920 hasPublicationYear "2004" @default.
- W2000360920 type Work @default.
- W2000360920 sameAs 2000360920 @default.
- W2000360920 citedByCount "2" @default.
- W2000360920 countsByYear W20003609202023 @default.
- W2000360920 crossrefType "proceedings-article" @default.
- W2000360920 hasAuthorship W2000360920A5012364219 @default.
- W2000360920 hasAuthorship W2000360920A5061913080 @default.
- W2000360920 hasAuthorship W2000360920A5075457874 @default.
- W2000360920 hasConcept C100460472 @default.
- W2000360920 hasConcept C102634674 @default.
- W2000360920 hasConcept C124634506 @default.
- W2000360920 hasConcept C130472188 @default.
- W2000360920 hasConcept C134306372 @default.
- W2000360920 hasConcept C136525101 @default.
- W2000360920 hasConcept C142724271 @default.
- W2000360920 hasConcept C160671074 @default.
- W2000360920 hasConcept C171250308 @default.
- W2000360920 hasConcept C191897082 @default.
- W2000360920 hasConcept C192562407 @default.
- W2000360920 hasConcept C204787440 @default.
- W2000360920 hasConcept C25197100 @default.
- W2000360920 hasConcept C2779227376 @default.
- W2000360920 hasConcept C2780997931 @default.
- W2000360920 hasConcept C33923547 @default.
- W2000360920 hasConcept C49040817 @default.
- W2000360920 hasConcept C544956773 @default.
- W2000360920 hasConcept C71924100 @default.
- W2000360920 hasConceptScore W2000360920C100460472 @default.
- W2000360920 hasConceptScore W2000360920C102634674 @default.
- W2000360920 hasConceptScore W2000360920C124634506 @default.
- W2000360920 hasConceptScore W2000360920C130472188 @default.
- W2000360920 hasConceptScore W2000360920C134306372 @default.
- W2000360920 hasConceptScore W2000360920C136525101 @default.
- W2000360920 hasConceptScore W2000360920C142724271 @default.
- W2000360920 hasConceptScore W2000360920C160671074 @default.
- W2000360920 hasConceptScore W2000360920C171250308 @default.
- W2000360920 hasConceptScore W2000360920C191897082 @default.
- W2000360920 hasConceptScore W2000360920C192562407 @default.
- W2000360920 hasConceptScore W2000360920C204787440 @default.
- W2000360920 hasConceptScore W2000360920C25197100 @default.
- W2000360920 hasConceptScore W2000360920C2779227376 @default.
- W2000360920 hasConceptScore W2000360920C2780997931 @default.
- W2000360920 hasConceptScore W2000360920C33923547 @default.
- W2000360920 hasConceptScore W2000360920C49040817 @default.
- W2000360920 hasConceptScore W2000360920C544956773 @default.
- W2000360920 hasConceptScore W2000360920C71924100 @default.
- W2000360920 hasLocation W20003609201 @default.
- W2000360920 hasOpenAccess W2000360920 @default.
- W2000360920 hasPrimaryLocation W20003609201 @default.
- W2000360920 hasRelatedWork W1703990253 @default.
- W2000360920 hasRelatedWork W1972230366 @default.
- W2000360920 hasRelatedWork W2029319775 @default.
- W2000360920 hasRelatedWork W2052512064 @default.
- W2000360920 hasRelatedWork W2055095209 @default.
- W2000360920 hasRelatedWork W2091036922 @default.
- W2000360920 hasRelatedWork W2095869416 @default.
- W2000360920 hasRelatedWork W2112558574 @default.
- W2000360920 hasRelatedWork W2354298856 @default.
- W2000360920 hasRelatedWork W2890511019 @default.
- W2000360920 isParatext "false" @default.
- W2000360920 isRetracted "false" @default.
- W2000360920 magId "2000360920" @default.
- W2000360920 workType "article" @default.