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• W2000362393 abstract "Abstract In this work we show a plasma-assisted process for the deposition of good quality a-SiO 2 layers on 4H–SiC as a possible alternative to thermal oxidation. We used the plasma enhanced chemical vapor deposition (PECVD) technique for the growth of a-SiO 2 layers on 4H–SiC using SiH 4 and CO 2 as precursor gases in H 2 dilution. We showed that good quality oxide layers could be obtained by this method, with a growth rate varying from 1.3 to 2.1 A/s, depending on the RF power. An estimation of the interface charge was obtained by high frequency capacitance voltage (HFCV) characteristic, obtaining values comparable to the ones typical of thermally grown oxides. This process was used for the growth of a-SiO 2 insulating and protecting layers in the fabrication of Schottky diodes based on 4H–SiC, obtaining a breakdown voltage higher than 600 V." @default.
• W2000362393 created "2016-06-24" @default.
• W2000362393 creator A5001743888 @default.
• W2000362393 creator A5010095925 @default.
• W2000362393 creator A5026131298 @default.
• W2000362393 creator A5039155712 @default.
• W2000362393 creator A5045947387 @default.
• W2000362393 creator A5083746577 @default.
• W2000362393 date "2004-11-01" @default.
• W2000362393 modified "2023-09-26" @default.
• W2000362393 title "Plasma-assisted SiC oxidation for power device fabrication" @default.
• W2000362393 cites W1972976879 @default.
• W2000362393 cites W1976728710 @default.
• W2000362393 cites W1990624522 @default.
• W2000362393 cites W1998598021 @default.
• W2000362393 cites W1999117309 @default.
• W2000362393 cites W2057150512 @default.
• W2000362393 cites W2160286674 @default.
• W2000362393 doi "https://doi.org/10.1016/j.apsusc.2004.05.224" @default.
• W2000362393 hasPublicationYear "2004" @default.
• W2000362393 type Work @default.
• W2000362393 sameAs 2000362393 @default.
• W2000362393 citedByCount "3" @default.
• W2000362393 countsByYear W20003623932019 @default.
• W2000362393 crossrefType "journal-article" @default.
• W2000362393 hasAuthorship W2000362393A5001743888 @default.
• W2000362393 hasAuthorship W2000362393A5010095925 @default.
• W2000362393 hasAuthorship W2000362393A5026131298 @default.
• W2000362393 hasAuthorship W2000362393A5039155712 @default.
• W2000362393 hasAuthorship W2000362393A5045947387 @default.
• W2000362393 hasAuthorship W2000362393A5083746577 @default.
• W2000362393 hasConcept C113196181 @default.
• W2000362393 hasConcept C119321828 @default.
• W2000362393 hasConcept C119599485 @default.
• W2000362393 hasConcept C121332964 @default.
• W2000362393 hasConcept C127413603 @default.
• W2000362393 hasConcept C136525101 @default.
• W2000362393 hasConcept C142724271 @default.
• W2000362393 hasConcept C151730666 @default.
• W2000362393 hasConcept C159985019 @default.
• W2000362393 hasConcept C165801399 @default.
• W2000362393 hasConcept C185592680 @default.
• W2000362393 hasConcept C191897082 @default.
• W2000362393 hasConcept C192562407 @default.
• W2000362393 hasConcept C204787440 @default.
• W2000362393 hasConcept C205200001 @default.
• W2000362393 hasConcept C2779281663 @default.
• W2000362393 hasConcept C2779851234 @default.
• W2000362393 hasConcept C2780722187 @default.
• W2000362393 hasConcept C2816523 @default.
• W2000362393 hasConcept C38347018 @default.
• W2000362393 hasConcept C43617362 @default.
• W2000362393 hasConcept C49040817 @default.
• W2000362393 hasConcept C544956773 @default.
• W2000362393 hasConcept C57410435 @default.
• W2000362393 hasConcept C62520636 @default.
• W2000362393 hasConcept C64297162 @default.
• W2000362393 hasConcept C71924100 @default.
• W2000362393 hasConcept C78434282 @default.
• W2000362393 hasConcept C82706917 @default.
• W2000362393 hasConcept C86803240 @default.
• W2000362393 hasConceptScore W2000362393C113196181 @default.
• W2000362393 hasConceptScore W2000362393C119321828 @default.
• W2000362393 hasConceptScore W2000362393C119599485 @default.
• W2000362393 hasConceptScore W2000362393C121332964 @default.
• W2000362393 hasConceptScore W2000362393C127413603 @default.
• W2000362393 hasConceptScore W2000362393C136525101 @default.
• W2000362393 hasConceptScore W2000362393C142724271 @default.
• W2000362393 hasConceptScore W2000362393C151730666 @default.
• W2000362393 hasConceptScore W2000362393C159985019 @default.
• W2000362393 hasConceptScore W2000362393C165801399 @default.
• W2000362393 hasConceptScore W2000362393C185592680 @default.
• W2000362393 hasConceptScore W2000362393C191897082 @default.
• W2000362393 hasConceptScore W2000362393C192562407 @default.
• W2000362393 hasConceptScore W2000362393C204787440 @default.
• W2000362393 hasConceptScore W2000362393C205200001 @default.
• W2000362393 hasConceptScore W2000362393C2779281663 @default.
• W2000362393 hasConceptScore W2000362393C2779851234 @default.
• W2000362393 hasConceptScore W2000362393C2780722187 @default.
• W2000362393 hasConceptScore W2000362393C2816523 @default.
• W2000362393 hasConceptScore W2000362393C38347018 @default.
• W2000362393 hasConceptScore W2000362393C43617362 @default.
• W2000362393 hasConceptScore W2000362393C49040817 @default.
• W2000362393 hasConceptScore W2000362393C544956773 @default.
• W2000362393 hasConceptScore W2000362393C57410435 @default.
• W2000362393 hasConceptScore W2000362393C62520636 @default.
• W2000362393 hasConceptScore W2000362393C64297162 @default.
• W2000362393 hasConceptScore W2000362393C71924100 @default.
• W2000362393 hasConceptScore W2000362393C78434282 @default.
• W2000362393 hasConceptScore W2000362393C82706917 @default.
• W2000362393 hasConceptScore W2000362393C86803240 @default.
• W2000362393 hasLocation W20003623931 @default.
• W2000362393 hasOpenAccess W2000362393 @default.
• W2000362393 hasPrimaryLocation W20003623931 @default.
• W2000362393 hasRelatedWork W1982708586 @default.
• W2000362393 hasRelatedWork W2042473800 @default.
• W2000362393 hasRelatedWork W2327331308 @default.
• W2000362393 hasRelatedWork W2606522423 @default.
• W2000362393 hasRelatedWork W2735780784 @default.
• W2000362393 hasRelatedWork W2887161680 @default.

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