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• W2000363594 abstract "Abstract The electrical, structural and optical properties of hydrogenated amorphous silicon (a-Si:H) films deposited from pure silane (SiH 4 ) using hot wire chemical vapor deposition (HW-CVD) technique are systematically studied as a function of silane flow rate F SiH 4 between 5 and 30 sccm. We found that the properties are greatly affected by the silane flow rate over the range we studied. The device quality a-Si:H films with a photosensitivity >10 5 were deposited by HW-CVD at a deposition rate >10 A s −1 using low silane flow rate. However, a-Si:H films deposited at higher silane flow rate and/or higher deposition rates show degradation in their structural and electrical properties. The FTIR studies indicate that the hydrogen bonding in a-Si:H films shifts from mono-hydrogen (Si–H) to di-hydrogen (Si–H 2 ) and (Si–H 2 ) n complexes when films were deposited at higher silane flow rate. The hydrogen content in the a-Si:H films increases with increase in silane flow rate and was found to be less than 10 at.%. The Raman spectra show increase in disorder and the Rayleigh scattering with increase in silane flow rate. The optical band gap also shows an increasing trend with silane flow rate. Therefore, only the hydrogen content cannot be accounted for the increase in the optical band gap. We think that the increase in the optical band gap may be due to the increase in the voids. These voids reduce the effective density of material and increase the average Si–Si distance, which is responsible for the increase in the band gap. Silane flow rate of 5 sccm, appears to be an optimum flow rate for the growth of mono-hydrogen (Si–H) bonded species having low hydrogen content (∼4.25 at%) in a-Si:H films at high deposition rate (∼12.5 A s −1 ), high photosensitivity (∼10 5 ) and small structural disorder." @default.
• W2000363594 created "2016-06-24" @default.
• W2000363594 creator A5004164169 @default.
• W2000363594 creator A5010598197 @default.
• W2000363594 creator A5067421365 @default.
• W2000363594 creator A5080803111 @default.
• W2000363594 creator A5090900147 @default.
• W2000363594 date "2002-02-01" @default.
• W2000363594 modified "2023-10-03" @default.
• W2000363594 title "Influence of silane flow on structural, optical and electrical properties of a-Si:H thin films deposited by hot wire chemical vapor deposition (HW-CVD) technique" @default.
• W2000363594 cites W1983504956 @default.
• W2000363594 cites W1989324997 @default.
• W2000363594 cites W2000003289 @default.
• W2000363594 cites W2004589580 @default.
• W2000363594 cites W2005379894 @default.
• W2000363594 cites W2012900242 @default.
• W2000363594 cites W2035480973 @default.
• W2000363594 cites W2038627540 @default.
• W2000363594 cites W2042129783 @default.
• W2000363594 cites W2043082993 @default.
• W2000363594 cites W2044861774 @default.
• W2000363594 cites W2045591673 @default.
• W2000363594 cites W2065177959 @default.
• W2000363594 cites W2067179786 @default.
• W2000363594 cites W2076915811 @default.
• W2000363594 cites W2079627233 @default.
• W2000363594 cites W2091781784 @default.
• W2000363594 cites W2092568185 @default.
• W2000363594 cites W2158155048 @default.
• W2000363594 cites W2625699652 @default.
• W2000363594 cites W2952791253 @default.
• W2000363594 cites W2994958912 @default.
• W2000363594 doi "https://doi.org/10.1016/s0927-0248(01)00051-4" @default.
• W2000363594 hasPublicationYear "2002" @default.
• W2000363594 type Work @default.
• W2000363594 sameAs 2000363594 @default.
• W2000363594 citedByCount "7" @default.
• W2000363594 countsByYear W20003635942023 @default.
• W2000363594 crossrefType "journal-article" @default.
• W2000363594 hasAuthorship W2000363594A5004164169 @default.
• W2000363594 hasAuthorship W2000363594A5010598197 @default.
• W2000363594 hasAuthorship W2000363594A5067421365 @default.
• W2000363594 hasAuthorship W2000363594A5080803111 @default.
• W2000363594 hasAuthorship W2000363594A5090900147 @default.
• W2000363594 hasConcept C113196181 @default.
• W2000363594 hasConcept C120665830 @default.
• W2000363594 hasConcept C121332964 @default.
• W2000363594 hasConcept C159985019 @default.
• W2000363594 hasConcept C171250308 @default.
• W2000363594 hasConcept C172120300 @default.
• W2000363594 hasConcept C178790620 @default.
• W2000363594 hasConcept C181966813 @default.
• W2000363594 hasConcept C185592680 @default.
• W2000363594 hasConcept C191897082 @default.
• W2000363594 hasConcept C192562407 @default.
• W2000363594 hasConcept C2776390347 @default.
• W2000363594 hasConcept C2778024649 @default.
• W2000363594 hasConcept C2778183973 @default.
• W2000363594 hasConcept C2779667780 @default.
• W2000363594 hasConcept C40003534 @default.
• W2000363594 hasConcept C49040817 @default.
• W2000363594 hasConcept C544956773 @default.
• W2000363594 hasConcept C56052488 @default.
• W2000363594 hasConcept C57410435 @default.
• W2000363594 hasConcept C62520636 @default.
• W2000363594 hasConceptScore W2000363594C113196181 @default.
• W2000363594 hasConceptScore W2000363594C120665830 @default.
• W2000363594 hasConceptScore W2000363594C121332964 @default.
• W2000363594 hasConceptScore W2000363594C159985019 @default.
• W2000363594 hasConceptScore W2000363594C171250308 @default.
• W2000363594 hasConceptScore W2000363594C172120300 @default.
• W2000363594 hasConceptScore W2000363594C178790620 @default.
• W2000363594 hasConceptScore W2000363594C181966813 @default.
• W2000363594 hasConceptScore W2000363594C185592680 @default.
• W2000363594 hasConceptScore W2000363594C191897082 @default.
• W2000363594 hasConceptScore W2000363594C192562407 @default.
• W2000363594 hasConceptScore W2000363594C2776390347 @default.
• W2000363594 hasConceptScore W2000363594C2778024649 @default.
• W2000363594 hasConceptScore W2000363594C2778183973 @default.
• W2000363594 hasConceptScore W2000363594C2779667780 @default.
• W2000363594 hasConceptScore W2000363594C40003534 @default.
• W2000363594 hasConceptScore W2000363594C49040817 @default.
• W2000363594 hasConceptScore W2000363594C544956773 @default.
• W2000363594 hasConceptScore W2000363594C56052488 @default.
• W2000363594 hasConceptScore W2000363594C57410435 @default.
• W2000363594 hasConceptScore W2000363594C62520636 @default.
• W2000363594 hasLocation W20003635941 @default.
• W2000363594 hasOpenAccess W2000363594 @default.
• W2000363594 hasPrimaryLocation W20003635941 @default.
• W2000363594 hasRelatedWork W1964203277 @default.
• W2000363594 hasRelatedWork W1973766260 @default.
• W2000363594 hasRelatedWork W1991300208 @default.
• W2000363594 hasRelatedWork W1993181176 @default.
• W2000363594 hasRelatedWork W1993950860 @default.
• W2000363594 hasRelatedWork W2008052370 @default.
• W2000363594 hasRelatedWork W2019928654 @default.
• W2000363594 hasRelatedWork W2026227732 @default.
• W2000363594 hasRelatedWork W2029580473 @default.
• W2000363594 hasRelatedWork W2032055066 @default.
• W2000363594 hasRelatedWork W2034634329 @default.

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