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• W2000367242 abstract "In this paper we present process challenges for the fabrication of energy harvesters and how they affect the performance. For the piezo harvesters, improved etching recipes and packaging enables to reduce the variation in resonance frequency from 8 to 1.5%. Similar results were obtained for electrostatic harvesters. For thermal harvesters, we find that when reducing dimensions, the output voltage will increase, but also the contact resistance R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>c</sub> . By optimizing the material stack, R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>c</sub> has been reduced by two orders of magnitude, tripling the output power." @default.
• W2000367242 created "2016-06-24" @default.
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• W2000367242 date "2011-12-01" @default.
• W2000367242 modified "2023-09-26" @default.
• W2000367242 title "Process challenges of MEMS harvesters and their effect on harvester performance" @default.
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• W2000367242 doi "https://doi.org/10.1109/iedm.2011.6131526" @default.
• W2000367242 hasPublicationYear "2011" @default.
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