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- W2000367839 abstract "In-situ Raman scattering results on vapor of phosphorus and arsenic at temperatures up to 1400 K are presented. The ratio of the Raman intensities of different species in the gas is proportional to the ratio of the corresponding partial pressures. The results of this new method for measuring partial pressures will be compared with thermodynamical calculations. The presented method allows the on line monitoring of the vapor atmosphere during crystal growth or annealing processes, which may be important for optimizing growth conditions, doping by the gas phase or quality optimizing of wafers." @default.
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- W2000367839 date "1999-02-01" @default.
- W2000367839 modified "2023-09-27" @default.
- W2000367839 title "Partial Pressure of Phosphorus and Arsenic Vapor Measured by Raman Scattering" @default.
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- W2000367839 doi "https://doi.org/10.1143/jjap.38.989" @default.
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