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- W2000370103 abstract "Concurrent low energy (50–70 eV) ion irradiation during silicon molecular beam epitaxy results in an increased epitaxial thickness at very low temperatures relative to conventional molecular beam epitaxy. Ion irradiation of a (1×1) dihydride‐terminated Si(001) results in a (2×1) reconstruction, indicating irradiation‐induced hydrogen desorption. Conventional molecular beam epitaxial growth is possible on a dihydride‐terminated Si(001) surface following (2×1) reconstruction such that the substrate temperature never exceeds 150 °C; which is not possible without irradiation." @default.
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- W2000370103 date "1993-05-17" @default.
- W2000370103 modified "2023-10-14" @default.
- W2000370103 title "Very low temperature (<400 °C) silicon molecular beam epitaxy: The role of low energy ion irradiation" @default.
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- W2000370103 doi "https://doi.org/10.1063/1.109298" @default.
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