Matches in SemOpenAlex for { <https://semopenalex.org/work/W2000372353> ?p ?o ?g. }
Showing items 1 to 65 of
65
with 100 items per page.
- W2000372353 abstract "The patterned getter film at wafer level has been proven to be the viable technical solution to integrate a getter film in vacuum packaged MEMS. The different MEMS vacuum bonding technologies such as eutectic, direct fusion and anodic bonding guarantee a suitable combination of time and temperature to properly activate the getter film. However, before any MEMS vacuum bonding process it has been discovered that a caustic chemical treatment of the getter film both cleans the film and enhances its performance without measurable degradation of its structural integrity. For example, caustic chemical treatment with SC1 with NH<sub>4</sub>OH and SC2 with HCl did not affect the morphology and the sorption capacities of the getter film and significantly increased the sorption capacity. The getter film at wafer level can withstand also treatment with a highly aggressive HNO<sub>3</sub> process. Therefore, we demonstrated the full compatibility of the getter film towards both temperature and chemical treatment with regards to the activation and capacity of the getter film." @default.
- W2000372353 created "2016-06-24" @default.
- W2000372353 creator A5011467759 @default.
- W2000372353 creator A5067561675 @default.
- W2000372353 creator A5075840308 @default.
- W2000372353 date "2004-01-24" @default.
- W2000372353 modified "2023-09-26" @default.
- W2000372353 title "Chemical treatment of getter films on wafers prior to vacuum packaging" @default.
- W2000372353 cites W1979180727 @default.
- W2000372353 cites W2025955013 @default.
- W2000372353 doi "https://doi.org/10.1117/12.525099" @default.
- W2000372353 hasPublicationYear "2004" @default.
- W2000372353 type Work @default.
- W2000372353 sameAs 2000372353 @default.
- W2000372353 citedByCount "6" @default.
- W2000372353 countsByYear W20003723532015 @default.
- W2000372353 crossrefType "proceedings-article" @default.
- W2000372353 hasAuthorship W2000372353A5011467759 @default.
- W2000372353 hasAuthorship W2000372353A5067561675 @default.
- W2000372353 hasAuthorship W2000372353A5075840308 @default.
- W2000372353 hasConcept C125099081 @default.
- W2000372353 hasConcept C127413603 @default.
- W2000372353 hasConcept C150394285 @default.
- W2000372353 hasConcept C159985019 @default.
- W2000372353 hasConcept C160671074 @default.
- W2000372353 hasConcept C178790620 @default.
- W2000372353 hasConcept C18168003 @default.
- W2000372353 hasConcept C185592680 @default.
- W2000372353 hasConcept C192562407 @default.
- W2000372353 hasConcept C37977207 @default.
- W2000372353 hasConcept C42360764 @default.
- W2000372353 hasConcept C49040817 @default.
- W2000372353 hasConcept C58445606 @default.
- W2000372353 hasConcept C87976508 @default.
- W2000372353 hasConceptScore W2000372353C125099081 @default.
- W2000372353 hasConceptScore W2000372353C127413603 @default.
- W2000372353 hasConceptScore W2000372353C150394285 @default.
- W2000372353 hasConceptScore W2000372353C159985019 @default.
- W2000372353 hasConceptScore W2000372353C160671074 @default.
- W2000372353 hasConceptScore W2000372353C178790620 @default.
- W2000372353 hasConceptScore W2000372353C18168003 @default.
- W2000372353 hasConceptScore W2000372353C185592680 @default.
- W2000372353 hasConceptScore W2000372353C192562407 @default.
- W2000372353 hasConceptScore W2000372353C37977207 @default.
- W2000372353 hasConceptScore W2000372353C42360764 @default.
- W2000372353 hasConceptScore W2000372353C49040817 @default.
- W2000372353 hasConceptScore W2000372353C58445606 @default.
- W2000372353 hasConceptScore W2000372353C87976508 @default.
- W2000372353 hasLocation W20003723531 @default.
- W2000372353 hasOpenAccess W2000372353 @default.
- W2000372353 hasPrimaryLocation W20003723531 @default.
- W2000372353 hasRelatedWork W1488416978 @default.
- W2000372353 hasRelatedWork W1545496076 @default.
- W2000372353 hasRelatedWork W1979180727 @default.
- W2000372353 hasRelatedWork W2001414798 @default.
- W2000372353 hasRelatedWork W2004492759 @default.
- W2000372353 hasRelatedWork W2030890954 @default.
- W2000372353 hasRelatedWork W2064551004 @default.
- W2000372353 hasRelatedWork W2098567686 @default.
- W2000372353 hasRelatedWork W2099374012 @default.
- W2000372353 hasRelatedWork W2740580571 @default.
- W2000372353 isParatext "false" @default.
- W2000372353 isRetracted "false" @default.
- W2000372353 magId "2000372353" @default.
- W2000372353 workType "article" @default.