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- W2000373959 abstract "A magnetic-field-superimposed field emission gun with low aberrations and equipped with a zirconiated tungsten emitter has been developed for applications where very stable high probe currents are required. It has been tested on a conventional electron microscope at 10 kV and on an electron beam testing system at 1 kV. Probe current i = 250 nA in a probe size d = 0.4 micron is obtained at 10 kV; at 1 kV the resolution is 0.1 micron with i = 5 nA, and 0.4 micron with i = 30 nA. For these probe currents, the spatial broadening effect due to electron-electron interactions in the beam is the preponderant factor limiting the probe size." @default.
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- W2000373959 date "1989-03-01" @default.
- W2000373959 modified "2023-09-25" @default.
- W2000373959 title "Magnetic field emission gun with zirconiated emitter" @default.
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- W2000373959 doi "https://doi.org/10.1002/jemt.1060110304" @default.
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